CA961175A - Induced electron emission spectrometer using plural radiation sources - Google Patents

Induced electron emission spectrometer using plural radiation sources

Info

Publication number
CA961175A
CA961175A CA142,270A CA142270A CA961175A CA 961175 A CA961175 A CA 961175A CA 142270 A CA142270 A CA 142270A CA 961175 A CA961175 A CA 961175A
Authority
CA
Canada
Prior art keywords
electron emission
radiation sources
emission spectrometer
induced electron
plural radiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA142,270A
Other versions
CA142270S (en
Inventor
Weston A. Anderson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates Inc filed Critical Varian Associates Inc
Application granted granted Critical
Publication of CA961175A publication Critical patent/CA961175A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/484—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with spherical mirrors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
CA142,270A 1971-05-17 1972-05-16 Induced electron emission spectrometer using plural radiation sources Expired CA961175A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US14410671A 1971-05-17 1971-05-17

Publications (1)

Publication Number Publication Date
CA961175A true CA961175A (en) 1975-01-14

Family

ID=22507062

Family Applications (1)

Application Number Title Priority Date Filing Date
CA142,270A Expired CA961175A (en) 1971-05-17 1972-05-16 Induced electron emission spectrometer using plural radiation sources

Country Status (5)

Country Link
US (1) US3787692A (en)
CA (1) CA961175A (en)
DE (1) DE2223086A1 (en)
FR (1) FR2138013B1 (en)
GB (1) GB1359926A (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3870882A (en) * 1973-05-23 1975-03-11 Gca Corp Esca x-ray source
US4126782A (en) * 1976-02-09 1978-11-21 Hitachi, Ltd. Electrostatic charged-particle analyzer
DE2743034C2 (en) * 1977-09-24 1982-06-03 Leybold-Heraeus GmbH, 5000 Köln Device for determining the energy of electrons
US4224518A (en) * 1978-12-21 1980-09-23 Varian Associates, Inc. Multistage cylindrical mirror analyzer incorporating a coaxial electron gun
US5444242A (en) * 1992-09-29 1995-08-22 Physical Electronics Inc. Scanning and high resolution electron spectroscopy and imaging
DE10217513B4 (en) * 2002-04-19 2004-06-17 Gesellschaft zur Förderung der Spektrochemie und angewandten Spektroskopie e.V. Method and device for the analysis of hidden, near-surface layers by means of photoelectron spectrometry
US8774359B1 (en) * 2010-07-30 2014-07-08 Kla-Tencor Corporation Gate stack metrology

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3114832A (en) * 1960-07-28 1963-12-17 Radiation Counter Lab Inc X-ray spectroscopic system comprising plural sources, filters, fluorescent radiators, and comparative detectors
US3248543A (en) * 1963-04-18 1966-04-26 Arthur H Pitchford X-ray spectrographic apparatus having a pair of X-ray tubes with different emission properties
US3461306A (en) * 1967-04-27 1969-08-12 Gen Electric Electron probe microanalyzer for measuring the differential energy response of auger electrons
US3596091A (en) * 1969-05-19 1971-07-27 Varian Associates Induced electron emission spectrometer having a unipotential sample chamber

Also Published As

Publication number Publication date
FR2138013A1 (en) 1972-12-29
US3787692A (en) 1974-01-22
DE2223086A1 (en) 1972-11-30
FR2138013B1 (en) 1973-07-13
GB1359926A (en) 1974-07-17

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