CA976594A - Field emission electron gun - Google Patents

Field emission electron gun

Info

Publication number
CA976594A
CA976594A CA161,598A CA161598A CA976594A CA 976594 A CA976594 A CA 976594A CA 161598 A CA161598 A CA 161598A CA 976594 A CA976594 A CA 976594A
Authority
CA
Canada
Prior art keywords
field emission
electron gun
emission electron
gun
field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA161,598A
Inventor
Vincent J. Coates
Leonard M. Welter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
American Optical Corp
Original Assignee
American Optical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by American Optical Corp filed Critical American Optical Corp
Application granted granted Critical
Publication of CA976594A publication Critical patent/CA976594A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
CA161,598A 1972-02-14 1973-01-18 Field emission electron gun Expired CA976594A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US22597072A 1972-02-14 1972-02-14

Publications (1)

Publication Number Publication Date
CA976594A true CA976594A (en) 1975-10-21

Family

ID=22847020

Family Applications (1)

Application Number Title Priority Date Filing Date
CA161,598A Expired CA976594A (en) 1972-02-14 1973-01-18 Field emission electron gun

Country Status (10)

Country Link
JP (1) JPS576225B2 (en)
AU (1) AU470515B2 (en)
CA (1) CA976594A (en)
DD (1) DD103095A5 (en)
DE (1) DE2304906C2 (en)
FR (1) FR2172251B1 (en)
GB (1) GB1410262A (en)
IT (1) IT977180B (en)
NL (1) NL175676C (en)
SE (1) SE380673B (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5425792B2 (en) * 1973-04-16 1979-08-30
JPS5023571A (en) * 1973-06-29 1975-03-13
JPS60192947A (en) * 1984-03-13 1985-10-01 Mitsubishi Electric Corp Photomask material for fabricating semiconductor device
US6683414B2 (en) * 2001-10-25 2004-01-27 Northrop Grumman Corporation Ion-shielded focusing method for high-density electron beams generated by planar cold cathode electron emitters

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3678333A (en) * 1970-06-15 1972-07-18 American Optical Corp Field emission electron gun utilizing means for protecting the field emission tip from high voltage discharges

Also Published As

Publication number Publication date
DE2304906A1 (en) 1973-08-23
JPS576225B2 (en) 1982-02-03
FR2172251A1 (en) 1973-09-28
NL175676C (en) 1984-12-03
JPS4948273A (en) 1974-05-10
SE380673B (en) 1975-11-10
AU5167373A (en) 1974-08-01
DD103095A5 (en) 1974-01-05
NL7301491A (en) 1973-08-16
IT977180B (en) 1974-09-10
GB1410262A (en) 1975-10-15
FR2172251B1 (en) 1978-05-26
DE2304906C2 (en) 1985-10-24
AU470515B2 (en) 1976-03-18
NL175676B (en) 1984-07-02

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