SE380673B - FIELD EMISSION CANNON. - Google Patents

FIELD EMISSION CANNON.

Info

Publication number
SE380673B
SE380673B SE7301997A SE7301997A SE380673B SE 380673 B SE380673 B SE 380673B SE 7301997 A SE7301997 A SE 7301997A SE 7301997 A SE7301997 A SE 7301997A SE 380673 B SE380673 B SE 380673B
Authority
SE
Sweden
Prior art keywords
field emission
cannon
emission cannon
field
emission
Prior art date
Application number
SE7301997A
Other languages
Swedish (sv)
Inventor
V J Coates
L M Welter
Original Assignee
American Optical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by American Optical Corp filed Critical American Optical Corp
Publication of SE380673B publication Critical patent/SE380673B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
SE7301997A 1972-02-14 1973-02-13 FIELD EMISSION CANNON. SE380673B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US22597072A 1972-02-14 1972-02-14

Publications (1)

Publication Number Publication Date
SE380673B true SE380673B (en) 1975-11-10

Family

ID=22847020

Family Applications (1)

Application Number Title Priority Date Filing Date
SE7301997A SE380673B (en) 1972-02-14 1973-02-13 FIELD EMISSION CANNON.

Country Status (10)

Country Link
JP (1) JPS576225B2 (en)
AU (1) AU470515B2 (en)
CA (1) CA976594A (en)
DD (1) DD103095A5 (en)
DE (1) DE2304906C2 (en)
FR (1) FR2172251B1 (en)
GB (1) GB1410262A (en)
IT (1) IT977180B (en)
NL (1) NL175676C (en)
SE (1) SE380673B (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5425792B2 (en) * 1973-04-16 1979-08-30
JPS5023571A (en) * 1973-06-29 1975-03-13
JPS60192947A (en) * 1984-03-13 1985-10-01 Mitsubishi Electric Corp Photomask material for fabricating semiconductor device
US6683414B2 (en) * 2001-10-25 2004-01-27 Northrop Grumman Corporation Ion-shielded focusing method for high-density electron beams generated by planar cold cathode electron emitters

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3678333A (en) * 1970-06-15 1972-07-18 American Optical Corp Field emission electron gun utilizing means for protecting the field emission tip from high voltage discharges

Also Published As

Publication number Publication date
JPS576225B2 (en) 1982-02-03
FR2172251A1 (en) 1973-09-28
NL175676C (en) 1984-12-03
AU470515B2 (en) 1976-03-18
GB1410262A (en) 1975-10-15
DD103095A5 (en) 1974-01-05
DE2304906A1 (en) 1973-08-23
AU5167373A (en) 1974-08-01
DE2304906C2 (en) 1985-10-24
FR2172251B1 (en) 1978-05-26
NL7301491A (en) 1973-08-16
IT977180B (en) 1974-09-10
NL175676B (en) 1984-07-02
JPS4948273A (en) 1974-05-10
CA976594A (en) 1975-10-21

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