CA935499A - Field emission electron gun - Google Patents

Field emission electron gun

Info

Publication number
CA935499A
CA935499A CA115223A CA115223A CA935499A CA 935499 A CA935499 A CA 935499A CA 115223 A CA115223 A CA 115223A CA 115223 A CA115223 A CA 115223A CA 935499 A CA935499 A CA 935499A
Authority
CA
Canada
Prior art keywords
field emission
electron gun
emission electron
gun
field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA115223A
Inventor
J. Coates Vincent
M. Welter Leonard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
American Optical Corp
Original Assignee
American Optical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by American Optical Corp filed Critical American Optical Corp
Application granted granted Critical
Publication of CA935499A publication Critical patent/CA935499A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/248—Components associated with high voltage supply
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/29—Reflection microscopes
    • H01J37/292—Reflection microscopes using scanning ray

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
CA115223A 1970-06-15 1971-06-09 Field emission electron gun Expired CA935499A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US4642570A 1970-06-15 1970-06-15

Publications (1)

Publication Number Publication Date
CA935499A true CA935499A (en) 1973-10-16

Family

ID=21943384

Family Applications (1)

Application Number Title Priority Date Filing Date
CA115223A Expired CA935499A (en) 1970-06-15 1971-06-09 Field emission electron gun

Country Status (3)

Country Link
JP (1) JPS5520332B1 (en)
CA (1) CA935499A (en)
SE (2) SE380929B (en)

Also Published As

Publication number Publication date
SE380928B (en) 1975-11-17
JPS5520332B1 (en) 1980-06-02
SE380929B (en) 1975-11-17

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