JPS5520332B1 - - Google Patents
Info
- Publication number
- JPS5520332B1 JPS5520332B1 JP4175671A JP4175671A JPS5520332B1 JP S5520332 B1 JPS5520332 B1 JP S5520332B1 JP 4175671 A JP4175671 A JP 4175671A JP 4175671 A JP4175671 A JP 4175671A JP S5520332 B1 JPS5520332 B1 JP S5520332B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/02—Electron guns
- H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/248—Components associated with high voltage supply
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/29—Reflection microscopes
- H01J37/292—Reflection microscopes using scanning ray
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US4642570A | 1970-06-15 | 1970-06-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5520332B1 true JPS5520332B1 (en) | 1980-06-02 |
Family
ID=21943384
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4175671A Pending JPS5520332B1 (en) | 1970-06-15 | 1971-06-14 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JPS5520332B1 (en) |
| CA (1) | CA935499A (en) |
| SE (2) | SE380929B (en) |
-
1971
- 1971-06-09 CA CA115223A patent/CA935499A/en not_active Expired
- 1971-06-11 SE SE7406467A patent/SE380929B/en not_active IP Right Cessation
- 1971-06-11 SE SE7107604A patent/SE380928B/en unknown
- 1971-06-14 JP JP4175671A patent/JPS5520332B1/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| SE380929B (en) | 1975-11-17 |
| CA935499A (en) | 1973-10-16 |
| SE380928B (en) | 1975-11-17 |