FR2099295A5 - - Google Patents

Info

Publication number
FR2099295A5
FR2099295A5 FR7122754A FR7122754A FR2099295A5 FR 2099295 A5 FR2099295 A5 FR 2099295A5 FR 7122754 A FR7122754 A FR 7122754A FR 7122754 A FR7122754 A FR 7122754A FR 2099295 A5 FR2099295 A5 FR 2099295A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7122754A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
American Optical Corp
Original Assignee
American Optical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by American Optical Corp filed Critical American Optical Corp
Application granted granted Critical
Publication of FR2099295A5 publication Critical patent/FR2099295A5/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/248—Components associated with high voltage supply
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/29—Reflection microscopes
    • H01J37/292—Reflection microscopes using scanning ray

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
FR7122754A 1970-06-15 1971-06-14 Expired FR2099295A5 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US4642570A 1970-06-15 1970-06-15
US17181571A 1971-08-16 1971-08-16

Publications (1)

Publication Number Publication Date
FR2099295A5 true FR2099295A5 (en) 1972-03-10

Family

ID=26723901

Family Applications (2)

Application Number Title Priority Date Filing Date
FR7122754A Expired FR2099295A5 (en) 1970-06-15 1971-06-14
FR7228997A Expired FR2149412B1 (en) 1970-06-15 1972-07-28

Family Applications After (1)

Application Number Title Priority Date Filing Date
FR7228997A Expired FR2149412B1 (en) 1970-06-15 1972-07-28

Country Status (7)

Country Link
US (2) US3678333A (en)
AU (1) AU466190B2 (en)
CA (1) CA950592A (en)
DE (2) DE2129636C2 (en)
FR (2) FR2099295A5 (en)
GB (2) GB1355365A (en)
NL (2) NL161297C (en)

Families Citing this family (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5217392B1 (en) * 1970-09-18 1977-05-14
JPS5015109B1 (en) * 1970-12-24 1975-06-02
US3921078A (en) * 1971-04-20 1975-11-18 Jeol Ltd Breakdown protection for field emission electron gun
JPS5318862B1 (en) * 1971-07-19 1978-06-17
DE2151167C3 (en) * 1971-10-14 1974-05-09 Siemens Ag, 1000 Berlin Und 8000 Muenchen Electron beam micro analyzer with Auger electron detection
CA976594A (en) * 1972-02-14 1975-10-21 Vincent J. Coates Field emission electron gun
JPS5420828B2 (en) * 1972-06-09 1979-07-25
DE2234381C3 (en) * 1972-07-10 1975-10-16 Siemens Ag, 1000 Berlin Und 8000 Muenchen Electron beam lighting system
US3809899A (en) * 1972-08-17 1974-05-07 Tektronix Inc Electron-beam tube including a thermionic-field emission cathode for a scanning electron microscope
NL7213355A (en) * 1972-10-03 1974-04-05
JPS49112565A (en) * 1973-02-23 1974-10-26
US3842272A (en) * 1973-07-24 1974-10-15 American Optical Corp Scanning charged particle microprobe with external spurious electric field effect correction
US4041316A (en) * 1974-09-20 1977-08-09 Hitachi, Ltd. Field emission electron gun with an evaporation source
US3946268A (en) * 1974-10-21 1976-03-23 American Optical Corporation Field emission gun improvement
DE2548831C2 (en) * 1974-12-20 1985-11-14 Nanometrics Inc., Sunnyvale, Calif. Pulse generator for raster display devices
DE2819165A1 (en) * 1978-05-02 1979-11-15 Siemens Ag SCANNING ELECTRON MICROSCOPE
FR2527383A1 (en) * 1982-05-24 1983-11-25 Univ Reims Champagne Ardenne ELECTRON GUN WITH FIELD EMISSION CATHODE AND MAGNETIC LENS
US4663525A (en) * 1985-07-08 1987-05-05 Nanometrics Incorporated Method for electron gun alignment in electron microscopes
WO1988002180A1 (en) * 1986-09-18 1988-03-24 Crewe Albert V Differential pressure electron beam system, method and gun
JPH0640475B2 (en) * 1988-01-25 1994-05-25 日本電子株式会社 Field emission electron gun
US4833362A (en) * 1988-04-19 1989-05-23 Orchid One Encapsulated high brightness electron beam source and system
US5150001A (en) * 1990-04-10 1992-09-22 Orchid One Corporation Field emission electron gun and method having complementary passive and active vacuum pumping
DE69131870T2 (en) * 1990-08-10 2000-08-17 Koninklijke Philips Electronics N.V., Eindhoven Charge beam device
US5401973A (en) * 1992-12-04 1995-03-28 Atomic Energy Of Canada Limited Industrial material processing electron linear accelerator
US5698942A (en) * 1996-07-22 1997-12-16 University Of North Carolina Field emitter flat panel display device and method for operating same
JP3147227B2 (en) * 1998-09-01 2001-03-19 日本電気株式会社 Cold cathode electron gun
EP1122761B1 (en) * 2000-02-01 2004-05-26 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Optical column for charged particle beam device
JP4262158B2 (en) * 2004-07-13 2009-05-13 株式会社日立ハイテクサイエンスシステムズ Low vacuum scanning electron microscope
JP2006216396A (en) * 2005-02-04 2006-08-17 Hitachi High-Technologies Corp Charged particle beam device
EP1983548A1 (en) * 2007-04-20 2008-10-22 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Emitter chamber, charged particle apparatus and method for operating same
US9189728B2 (en) 2009-07-23 2015-11-17 I-Property Holding Corp. Method for the authentication of dosage forms
WO2011096227A1 (en) * 2010-02-08 2011-08-11 株式会社日立ハイテクノロジーズ Charged particle microscope and ion microscope
US8796638B2 (en) 2011-06-08 2014-08-05 Mks Instruments, Inc. Mass spectrometry for a gas analysis with a two-stage charged particle deflector lens between a charged particle source and a charged particle analyzer both offset from a central axis of the deflector lens
US8796620B2 (en) * 2011-06-08 2014-08-05 Mks Instruments, Inc. Mass spectrometry for gas analysis with a one-stage charged particle deflector lens between a charged particle source and a charged particle analyzer both offset from a central axis of the deflector lens
US8450681B2 (en) 2011-06-08 2013-05-28 Mks Instruments, Inc. Mass spectrometry for gas analysis in which both a charged particle source and a charged particle analyzer are offset from an axis of a deflector lens, resulting in reduced baseline signal offsets
US9224572B2 (en) * 2012-12-18 2015-12-29 General Electric Company X-ray tube with adjustable electron beam
US10297416B2 (en) 2014-10-20 2019-05-21 Hitachi High-Technologies Corporation Scanning electron microscope
US9981293B2 (en) * 2016-04-21 2018-05-29 Mapper Lithography Ip B.V. Method and system for the removal and/or avoidance of contamination in charged particle beam systems

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE735313C (en) * 1937-06-30 1943-05-12 Aeg Device for generating a preferably intensity-controlled electron beam by field emission from a cold cathode provided with a tip using an electron-optical imaging system
US2243362A (en) * 1938-08-20 1941-05-27 Thomas W Sukumlyn Electron microscope system
US2363359A (en) * 1941-05-01 1944-11-21 Gen Electric Electron microscope
US2289071A (en) * 1941-10-03 1942-07-07 Gen Electric Electron lens
FR937296A (en) * 1947-06-21 1948-08-12 Csf Improvements to focusing devices, for electron microscopes
BE481554A (en) * 1947-06-26
US3090882A (en) * 1960-04-13 1963-05-21 Rca Corp Electron gun
US3191028A (en) * 1963-04-22 1965-06-22 Albert V Crewe Scanning electron microscope
US3394874A (en) * 1967-02-09 1968-07-30 Gen Electrodynamics Corp Ion pumping electron gun

Also Published As

Publication number Publication date
US3678333A (en) 1972-07-18
DE2129636C2 (en) 1986-04-10
NL161297C (en) 1980-01-15
NL165604C (en) 1981-04-15
US3784815A (en) 1974-01-08
AU466190B2 (en) 1973-12-13
NL7209179A (en) 1973-02-20
FR2149412B1 (en) 1978-02-03
GB1355365A (en) 1974-06-05
DE2235903A1 (en) 1973-03-01
DE2129636A1 (en) 1971-12-23
NL165604B (en) 1980-11-17
NL161297B (en) 1979-08-15
GB1378554A (en) 1974-12-27
AU4319672A (en) 1973-12-13
NL7108096A (en) 1971-12-17
CA950592A (en) 1974-07-02
DE2235903C2 (en) 1986-04-17
FR2149412A1 (en) 1973-03-30

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Legal Events

Date Code Title Description
TP Transmission of property
TP Transmission of property