JPS5318862B1 - - Google Patents
Info
- Publication number
- JPS5318862B1 JPS5318862B1 JP5315971A JP5315971A JPS5318862B1 JP S5318862 B1 JPS5318862 B1 JP S5318862B1 JP 5315971 A JP5315971 A JP 5315971A JP 5315971 A JP5315971 A JP 5315971A JP S5318862 B1 JPS5318862 B1 JP S5318862B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/02—Electron guns
- H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5315971A JPS5318862B1 (en) | 1971-07-19 | 1971-07-19 | |
| US00272809A US3775630A (en) | 1971-07-19 | 1972-07-18 | Electron gun device of field emission type |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5315971A JPS5318862B1 (en) | 1971-07-19 | 1971-07-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5318862B1 true JPS5318862B1 (en) | 1978-06-17 |
Family
ID=12935051
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5315971A Pending JPS5318862B1 (en) | 1971-07-19 | 1971-07-19 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US3775630A (en) |
| JP (1) | JPS5318862B1 (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2417179A1 (en) * | 1978-02-08 | 1979-09-07 | Hitachi Ltd | ELECTRONIC CANNON WITH FIELD EMISSION |
| JPS57132632A (en) * | 1981-02-09 | 1982-08-17 | Hitachi Ltd | Ion source |
| JPS58225537A (en) * | 1982-06-25 | 1983-12-27 | Hitachi Ltd | Ion source unit |
| US4596942A (en) * | 1983-06-17 | 1986-06-24 | National Institute For Researches In Inorganic Materials | Field emission type electron gun |
| DE69217829T2 (en) * | 1991-11-08 | 1997-06-12 | Fujitsu Ltd | Field emission arrangement and cleaning process therefor |
| US8736170B1 (en) * | 2011-02-22 | 2014-05-27 | Fei Company | Stable cold field emission electron source |
| US20230197399A1 (en) * | 2021-12-21 | 2023-06-22 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Electron microscope, electron source for electron microscope, and methods of operating an electron microscope |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS534387A (en) * | 1976-07-01 | 1978-01-14 | Toshiba Corp | Coloring projector |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3678333A (en) * | 1970-06-15 | 1972-07-18 | American Optical Corp | Field emission electron gun utilizing means for protecting the field emission tip from high voltage discharges |
-
1971
- 1971-07-19 JP JP5315971A patent/JPS5318862B1/ja active Pending
-
1972
- 1972-07-18 US US00272809A patent/US3775630A/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS534387A (en) * | 1976-07-01 | 1978-01-14 | Toshiba Corp | Coloring projector |
Also Published As
| Publication number | Publication date |
|---|---|
| US3775630A (en) | 1973-11-27 |