JPS5217392B1 - - Google Patents

Info

Publication number
JPS5217392B1
JPS5217392B1 JP45081283A JP8128370A JPS5217392B1 JP S5217392 B1 JPS5217392 B1 JP S5217392B1 JP 45081283 A JP45081283 A JP 45081283A JP 8128370 A JP8128370 A JP 8128370A JP S5217392 B1 JPS5217392 B1 JP S5217392B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP45081283A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP45081283A priority Critical patent/JPS5217392B1/ja
Priority to DE19712146691 priority patent/DE2146691C3/en
Priority to US00182041A priority patent/US3846663A/en
Publication of JPS5217392B1 publication Critical patent/JPS5217392B1/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP45081283A 1970-09-18 1970-09-18 Pending JPS5217392B1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP45081283A JPS5217392B1 (en) 1970-09-18 1970-09-18
DE19712146691 DE2146691C3 (en) 1970-09-18 1971-09-17 Field emission type electron gun
US00182041A US3846663A (en) 1970-09-18 1971-09-20 Electron gun device having a field emission cathode tip protected from destruction due to ion impingement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP45081283A JPS5217392B1 (en) 1970-09-18 1970-09-18

Publications (1)

Publication Number Publication Date
JPS5217392B1 true JPS5217392B1 (en) 1977-05-14

Family

ID=13742031

Family Applications (1)

Application Number Title Priority Date Filing Date
JP45081283A Pending JPS5217392B1 (en) 1970-09-18 1970-09-18

Country Status (2)

Country Link
US (1) US3846663A (en)
JP (1) JPS5217392B1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4427886A (en) * 1982-08-02 1984-01-24 Wisconsin Alumni Research Foundation Low voltage field emission electron gun
US5834781A (en) * 1996-02-14 1998-11-10 Hitachi, Ltd. Electron source and electron beam-emitting apparatus equipped with same

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB525022A (en) * 1938-02-11 1940-08-20 Telefunken Gmbh Improvements in or relating to modulation systems for modulating ultra short waves
CA432875A (en) * 1939-07-29 1946-01-29 G. Ramberg Edward Electron microscope
US2363359A (en) * 1941-05-01 1944-11-21 Gen Electric Electron microscope
US2384087A (en) * 1942-04-01 1945-09-04 Rca Corp Current limiter
US2888606A (en) * 1956-08-27 1959-05-26 Rca Corp Modulation control for cathode ray tubes
US3141993A (en) * 1959-12-24 1964-07-21 Zeiss Jena Veb Carl Very fine beam electron gun
US3191028A (en) * 1963-04-22 1965-06-22 Albert V Crewe Scanning electron microscope
US3452241A (en) * 1966-09-06 1969-06-24 Rca Corp Electron gun suitable for electron microscope
US3678333A (en) * 1970-06-15 1972-07-18 American Optical Corp Field emission electron gun utilizing means for protecting the field emission tip from high voltage discharges

Also Published As

Publication number Publication date
DE2146691A1 (en) 1972-03-23
US3846663A (en) 1974-11-05
DE2146691B2 (en) 1975-11-06

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