NL7213355A - - Google Patents

Info

Publication number
NL7213355A
NL7213355A NL7213355A NL7213355A NL7213355A NL 7213355 A NL7213355 A NL 7213355A NL 7213355 A NL7213355 A NL 7213355A NL 7213355 A NL7213355 A NL 7213355A NL 7213355 A NL7213355 A NL 7213355A
Authority
NL
Netherlands
Application number
NL7213355A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to NL7213355A priority Critical patent/NL7213355A/xx
Priority to CA182,224A priority patent/CA992670A/en
Priority to BE136239A priority patent/BE805539A/en
Priority to GB4577273A priority patent/GB1440776A/en
Priority to IT7352853A priority patent/IT994357B/en
Priority to SE7313345A priority patent/SE384759B/en
Priority to US402844A priority patent/US3864572A/en
Priority to DE2349352A priority patent/DE2349352C3/en
Priority to JP48110595A priority patent/JPS5241137B2/ja
Priority to FR7335310A priority patent/FR2201540B1/fr
Publication of NL7213355A publication Critical patent/NL7213355A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/075—Electron guns using thermionic emission from cathodes heated by particle bombardment or by irradiation, e.g. by laser
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/024—Electron guns using thermionic emission of cathode heated by electron or ion bombardment or by irradiation by other energetic beams, e.g. by laser
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06308—Thermionic sources
    • H01J2237/06316—Schottky emission
NL7213355A 1972-10-03 1972-10-03 NL7213355A (en)

Priority Applications (10)

Application Number Priority Date Filing Date Title
NL7213355A NL7213355A (en) 1972-10-03 1972-10-03
CA182,224A CA992670A (en) 1972-10-03 1973-10-01 Electron beam apparatus comprising a point cathode
BE136239A BE805539A (en) 1972-10-03 1973-10-01 ELECTRONIC BEAM DEVICE, EQUIPPED WITH A PUNCTUAL CATHODE
GB4577273A GB1440776A (en) 1972-10-03 1973-10-01 Electron-beam apparatus
IT7352853A IT994357B (en) 1972-10-03 1973-10-01 IMPROVEMENT IN ELECTRONIC BEAM APPLIANCES INCLUDING A POINTED CATHODE
SE7313345A SE384759B (en) 1972-10-03 1973-10-01 ELECTRON RADIATOR
US402844A US3864572A (en) 1972-10-03 1973-10-02 Electron beam apparatus comprising a point cathode
DE2349352A DE2349352C3 (en) 1972-10-03 1973-10-02 Method for operating an electron gun
JP48110595A JPS5241137B2 (en) 1972-10-03 1973-10-03
FR7335310A FR2201540B1 (en) 1972-10-03 1973-10-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7213355A NL7213355A (en) 1972-10-03 1972-10-03

Publications (1)

Publication Number Publication Date
NL7213355A true NL7213355A (en) 1974-04-05

Family

ID=19817064

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7213355A NL7213355A (en) 1972-10-03 1972-10-03

Country Status (10)

Country Link
US (1) US3864572A (en)
JP (1) JPS5241137B2 (en)
BE (1) BE805539A (en)
CA (1) CA992670A (en)
DE (1) DE2349352C3 (en)
FR (1) FR2201540B1 (en)
GB (1) GB1440776A (en)
IT (1) IT994357B (en)
NL (1) NL7213355A (en)
SE (1) SE384759B (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5533310U (en) * 1978-08-24 1980-03-04
JPS58126376U (en) * 1982-02-20 1983-08-27 深沢　房次郎 door stopper
US4496881A (en) 1982-09-29 1985-01-29 Tetra Pak Developpement Sa Method of cold cathode replenishment in electron beam apparatus and replenishable cold cathode assembly
JPS59163506A (en) * 1983-03-09 1984-09-14 Hitachi Ltd Electronic beam measuring device
US4762975A (en) * 1984-02-06 1988-08-09 Phrasor Scientific, Incorporated Method and apparatus for making submicrom powders
US4829177A (en) * 1986-09-11 1989-05-09 Gregory Hirsch Point projection photoelectron microscope with hollow needle
JPH02134503A (en) * 1988-11-15 1990-05-23 Mitsubishi Electric Corp Scanning type tunnel microscope
DE3839707A1 (en) * 1988-11-24 1990-05-31 Integrated Circuit Testing METHOD FOR OPERATING AN ELECTRON BEAM MEASURING DEVICE
JPH03190044A (en) * 1989-12-19 1991-08-20 Ebara Corp Electron beam accelerator
US5015862A (en) * 1990-01-22 1991-05-14 Oregon Graduate Institute Of Science & Technology Laser modulation of LMI sources
ES2029426A6 (en) * 1991-03-22 1992-08-01 Univ Madrid Metal ion source with surface melting by application of an electric field.
US5568004A (en) * 1992-09-07 1996-10-22 Kleindiek; Stephan Electromechanical positioning device
US6828996B2 (en) 2001-06-22 2004-12-07 Applied Materials, Inc. Electron beam patterning with a heated electron source
DE10245052A1 (en) 2002-09-26 2004-04-08 Leo Elektronenmikroskopie Gmbh Electron beam source and electron optical apparatus with one
US6847164B2 (en) * 2002-12-10 2005-01-25 Applied Matrials, Inc. Current-stabilizing illumination of photocathode electron beam source
US11417492B2 (en) * 2019-09-26 2022-08-16 Kla Corporation Light modulated electron source

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3388280A (en) * 1966-04-19 1968-06-11 Victor E. De Lucia Laser energized hot cathode type of electron discharge device
US3678333A (en) * 1970-06-15 1972-07-18 American Optical Corp Field emission electron gun utilizing means for protecting the field emission tip from high voltage discharges

Also Published As

Publication number Publication date
SE384759B (en) 1976-05-17
IT994357B (en) 1975-10-20
FR2201540A1 (en) 1974-04-26
CA992670A (en) 1976-07-06
JPS4993798A (en) 1974-09-06
FR2201540B1 (en) 1976-11-19
DE2349352C3 (en) 1978-03-30
DE2349352B2 (en) 1977-07-21
JPS5241137B2 (en) 1977-10-17
US3864572A (en) 1975-02-04
GB1440776A (en) 1976-06-23
BE805539A (en) 1974-04-01
DE2349352A1 (en) 1974-04-11

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