JPS5241137B2 - - Google Patents

Info

Publication number
JPS5241137B2
JPS5241137B2 JP48110595A JP11059573A JPS5241137B2 JP S5241137 B2 JPS5241137 B2 JP S5241137B2 JP 48110595 A JP48110595 A JP 48110595A JP 11059573 A JP11059573 A JP 11059573A JP S5241137 B2 JPS5241137 B2 JP S5241137B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP48110595A
Other versions
JPS4993798A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4993798A publication Critical patent/JPS4993798A/ja
Publication of JPS5241137B2 publication Critical patent/JPS5241137B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/075—Electron guns using thermionic emission from cathodes heated by particle bombardment or by irradiation, e.g. by laser
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/024—Electron guns using thermionic emission of cathode heated by electron or ion bombardment or by irradiation by other energetic beams, e.g. by laser
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06308—Thermionic sources
    • H01J2237/06316—Schottky emission

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Particle Accelerators (AREA)
JP48110595A 1972-10-03 1973-10-03 Expired JPS5241137B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7213355A NL7213355A (ja) 1972-10-03 1972-10-03

Publications (2)

Publication Number Publication Date
JPS4993798A JPS4993798A (ja) 1974-09-06
JPS5241137B2 true JPS5241137B2 (ja) 1977-10-17

Family

ID=19817064

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48110595A Expired JPS5241137B2 (ja) 1972-10-03 1973-10-03

Country Status (10)

Country Link
US (1) US3864572A (ja)
JP (1) JPS5241137B2 (ja)
BE (1) BE805539A (ja)
CA (1) CA992670A (ja)
DE (1) DE2349352C3 (ja)
FR (1) FR2201540B1 (ja)
GB (1) GB1440776A (ja)
IT (1) IT994357B (ja)
NL (1) NL7213355A (ja)
SE (1) SE384759B (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5533310U (ja) * 1978-08-24 1980-03-04
JPS58126376U (ja) * 1982-02-20 1983-08-27 深沢　房次郎 扉のストツパ

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4496881A (en) 1982-09-29 1985-01-29 Tetra Pak Developpement Sa Method of cold cathode replenishment in electron beam apparatus and replenishable cold cathode assembly
JPS59163506A (ja) * 1983-03-09 1984-09-14 Hitachi Ltd 電子ビ−ム測長装置
US4762975A (en) * 1984-02-06 1988-08-09 Phrasor Scientific, Incorporated Method and apparatus for making submicrom powders
US4829177A (en) * 1986-09-11 1989-05-09 Gregory Hirsch Point projection photoelectron microscope with hollow needle
JPH02134503A (ja) * 1988-11-15 1990-05-23 Mitsubishi Electric Corp 走査型トンネル顕微鏡
DE3839707A1 (de) * 1988-11-24 1990-05-31 Integrated Circuit Testing Verfahren zum betrieb eines elektronenstrahlmessgeraetes
JPH03190044A (ja) * 1989-12-19 1991-08-20 Ebara Corp 電子線加速器
US5015862A (en) * 1990-01-22 1991-05-14 Oregon Graduate Institute Of Science & Technology Laser modulation of LMI sources
ES2029426A6 (es) * 1991-03-22 1992-08-01 Univ Madrid Obtencion de una fuente atomica de iones metalicos produciendo una fusion superficial por medio de un campo electrico.
US5568004A (en) * 1992-09-07 1996-10-22 Kleindiek; Stephan Electromechanical positioning device
US6828996B2 (en) 2001-06-22 2004-12-07 Applied Materials, Inc. Electron beam patterning with a heated electron source
DE10245052A1 (de) * 2002-09-26 2004-04-08 Leo Elektronenmikroskopie Gmbh Elektronenstrahlquelle und elektronenoptischer Apparat mit einer solchen
US6847164B2 (en) * 2002-12-10 2005-01-25 Applied Matrials, Inc. Current-stabilizing illumination of photocathode electron beam source
US11417492B2 (en) * 2019-09-26 2022-08-16 Kla Corporation Light modulated electron source

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3388280A (en) * 1966-04-19 1968-06-11 Victor E. De Lucia Laser energized hot cathode type of electron discharge device
US3678333A (en) * 1970-06-15 1972-07-18 American Optical Corp Field emission electron gun utilizing means for protecting the field emission tip from high voltage discharges

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5533310U (ja) * 1978-08-24 1980-03-04
JPS58126376U (ja) * 1982-02-20 1983-08-27 深沢　房次郎 扉のストツパ

Also Published As

Publication number Publication date
CA992670A (en) 1976-07-06
BE805539A (fr) 1974-04-01
FR2201540A1 (ja) 1974-04-26
IT994357B (it) 1975-10-20
DE2349352A1 (de) 1974-04-11
FR2201540B1 (ja) 1976-11-19
GB1440776A (en) 1976-06-23
DE2349352B2 (de) 1977-07-21
NL7213355A (ja) 1974-04-05
US3864572A (en) 1975-02-04
DE2349352C3 (de) 1978-03-30
JPS4993798A (ja) 1974-09-06
SE384759B (sv) 1976-05-17

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