NL7213355A - - Google Patents

Info

Publication number
NL7213355A
NL7213355A NL7213355A NL7213355A NL7213355A NL 7213355 A NL7213355 A NL 7213355A NL 7213355 A NL7213355 A NL 7213355A NL 7213355 A NL7213355 A NL 7213355A NL 7213355 A NL7213355 A NL 7213355A
Authority
NL
Netherlands
Application number
NL7213355A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to NL7213355A priority Critical patent/NL7213355A/xx
Priority to BE136239A priority patent/BE805539A/xx
Priority to SE7313345A priority patent/SE384759B/xx
Priority to CA182,224A priority patent/CA992670A/en
Priority to GB4577273A priority patent/GB1440776A/en
Priority to IT7352853A priority patent/IT994357B/it
Priority to DE2349352A priority patent/DE2349352C3/de
Priority to US402844A priority patent/US3864572A/en
Priority to FR7335310A priority patent/FR2201540B1/fr
Priority to JP48110595A priority patent/JPS5241137B2/ja
Publication of NL7213355A publication Critical patent/NL7213355A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/075—Electron guns using thermionic emission from cathodes heated by particle bombardment or by irradiation, e.g. by laser
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/024—Electron guns using thermionic emission of cathode heated by electron or ion bombardment or by irradiation by other energetic beams, e.g. by laser
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06308—Thermionic sources
    • H01J2237/06316—Schottky emission

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Particle Accelerators (AREA)
NL7213355A 1972-10-03 1972-10-03 NL7213355A (ja)

Priority Applications (10)

Application Number Priority Date Filing Date Title
NL7213355A NL7213355A (ja) 1972-10-03 1972-10-03
BE136239A BE805539A (fr) 1972-10-03 1973-10-01 Appareil a faisceau electronique, muni d'une cathode ponctuelle
SE7313345A SE384759B (sv) 1972-10-03 1973-10-01 Elektronstraleapparat
CA182,224A CA992670A (en) 1972-10-03 1973-10-01 Electron beam apparatus comprising a point cathode
GB4577273A GB1440776A (en) 1972-10-03 1973-10-01 Electron-beam apparatus
IT7352853A IT994357B (it) 1972-10-03 1973-10-01 Perfezionamento negli apparecchi a fascio elettronico comprendenti un catodo a punta
DE2349352A DE2349352C3 (de) 1972-10-03 1973-10-02 Verfahren zum Betrieb eines Elektronenstrahlerzeugers
US402844A US3864572A (en) 1972-10-03 1973-10-02 Electron beam apparatus comprising a point cathode
FR7335310A FR2201540B1 (ja) 1972-10-03 1973-10-03
JP48110595A JPS5241137B2 (ja) 1972-10-03 1973-10-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7213355A NL7213355A (ja) 1972-10-03 1972-10-03

Publications (1)

Publication Number Publication Date
NL7213355A true NL7213355A (ja) 1974-04-05

Family

ID=19817064

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7213355A NL7213355A (ja) 1972-10-03 1972-10-03

Country Status (10)

Country Link
US (1) US3864572A (ja)
JP (1) JPS5241137B2 (ja)
BE (1) BE805539A (ja)
CA (1) CA992670A (ja)
DE (1) DE2349352C3 (ja)
FR (1) FR2201540B1 (ja)
GB (1) GB1440776A (ja)
IT (1) IT994357B (ja)
NL (1) NL7213355A (ja)
SE (1) SE384759B (ja)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5533310U (ja) * 1978-08-24 1980-03-04
JPS58126376U (ja) * 1982-02-20 1983-08-27 深沢　房次郎 扉のストツパ
US4496881A (en) 1982-09-29 1985-01-29 Tetra Pak Developpement Sa Method of cold cathode replenishment in electron beam apparatus and replenishable cold cathode assembly
JPS59163506A (ja) * 1983-03-09 1984-09-14 Hitachi Ltd 電子ビ−ム測長装置
US4762975A (en) * 1984-02-06 1988-08-09 Phrasor Scientific, Incorporated Method and apparatus for making submicrom powders
US4829177A (en) * 1986-09-11 1989-05-09 Gregory Hirsch Point projection photoelectron microscope with hollow needle
JPH02134503A (ja) * 1988-11-15 1990-05-23 Mitsubishi Electric Corp 走査型トンネル顕微鏡
DE3839707A1 (de) * 1988-11-24 1990-05-31 Integrated Circuit Testing Verfahren zum betrieb eines elektronenstrahlmessgeraetes
JPH03190044A (ja) * 1989-12-19 1991-08-20 Ebara Corp 電子線加速器
US5015862A (en) * 1990-01-22 1991-05-14 Oregon Graduate Institute Of Science & Technology Laser modulation of LMI sources
ES2029426A6 (es) * 1991-03-22 1992-08-01 Univ Madrid Obtencion de una fuente atomica de iones metalicos produciendo una fusion superficial por medio de un campo electrico.
DE69302084T2 (de) * 1992-09-07 1996-09-12 Stephan Kleindiek Elektromechanische positionierungsvorrichtung.
US6828996B2 (en) 2001-06-22 2004-12-07 Applied Materials, Inc. Electron beam patterning with a heated electron source
DE10245052A1 (de) 2002-09-26 2004-04-08 Leo Elektronenmikroskopie Gmbh Elektronenstrahlquelle und elektronenoptischer Apparat mit einer solchen
US6847164B2 (en) * 2002-12-10 2005-01-25 Applied Matrials, Inc. Current-stabilizing illumination of photocathode electron beam source
US11417492B2 (en) * 2019-09-26 2022-08-16 Kla Corporation Light modulated electron source

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3388280A (en) * 1966-04-19 1968-06-11 Victor E. De Lucia Laser energized hot cathode type of electron discharge device
US3678333A (en) * 1970-06-15 1972-07-18 American Optical Corp Field emission electron gun utilizing means for protecting the field emission tip from high voltage discharges

Also Published As

Publication number Publication date
DE2349352A1 (de) 1974-04-11
CA992670A (en) 1976-07-06
BE805539A (fr) 1974-04-01
SE384759B (sv) 1976-05-17
FR2201540B1 (ja) 1976-11-19
DE2349352B2 (de) 1977-07-21
DE2349352C3 (de) 1978-03-30
GB1440776A (en) 1976-06-23
US3864572A (en) 1975-02-04
FR2201540A1 (ja) 1974-04-26
JPS5241137B2 (ja) 1977-10-17
JPS4993798A (ja) 1974-09-06
IT994357B (it) 1975-10-20

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