DE69302084T2 - Elektromechanische positionierungsvorrichtung. - Google Patents

Elektromechanische positionierungsvorrichtung.

Info

Publication number
DE69302084T2
DE69302084T2 DE69302084T DE69302084T DE69302084T2 DE 69302084 T2 DE69302084 T2 DE 69302084T2 DE 69302084 T DE69302084 T DE 69302084T DE 69302084 T DE69302084 T DE 69302084T DE 69302084 T2 DE69302084 T2 DE 69302084T2
Authority
DE
Germany
Prior art keywords
positioning device
electromechanical positioning
electromechanical
positioning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69302084T
Other languages
English (en)
Other versions
DE69302084D1 (de
Inventor
Stephan Kleindiek
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of DE69302084D1 publication Critical patent/DE69302084D1/de
Application granted granted Critical
Publication of DE69302084T2 publication Critical patent/DE69302084T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/003—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
    • H02N2/025—Inertial sliding motors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement
    • H01J2237/20264—Piezoelectric devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/872—Positioner
DE69302084T 1992-09-07 1993-09-07 Elektromechanische positionierungsvorrichtung. Expired - Lifetime DE69302084T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP92202696 1992-09-07
PCT/EP1993/002414 WO1994006160A1 (en) 1992-09-07 1993-09-07 Electromechanical positioning device

Publications (2)

Publication Number Publication Date
DE69302084D1 DE69302084D1 (de) 1996-05-09
DE69302084T2 true DE69302084T2 (de) 1996-09-12

Family

ID=8210895

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69302084T Expired - Lifetime DE69302084T2 (de) 1992-09-07 1993-09-07 Elektromechanische positionierungsvorrichtung.

Country Status (5)

Country Link
US (1) US5568004A (de)
EP (1) EP0611485B1 (de)
AU (1) AU4958493A (de)
DE (1) DE69302084T2 (de)
WO (1) WO1994006160A1 (de)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10148267A1 (de) * 2001-06-12 2003-01-30 Physik Instr Pi Gmbh & Co Kg Piezolinearantrieb mit einer Gruppe von Piezostapelaktoren sowie Verfahren zum Betreiben eines solchen Antriebes
DE102008061666A1 (de) 2008-12-12 2010-06-17 Otto-Von-Guericke-Universität Magdeburg Positionierungsvorrichtung
EP2242122A2 (de) 2009-04-16 2010-10-20 Physik Instrumente (PI) GmbH & Co. KG Betriebsverfahren und Ansteuereinrichtung eines Piezolinearantriebes
US9018823B2 (en) 2009-03-18 2015-04-28 Forschungszentrum Juelich Gmbh Apparatus and method for electromechanical positioning
EP2916450A1 (de) * 2014-03-03 2015-09-09 Picofine GmbH Antriebsvorrichtung und Verfahren für die Erzeugung einer geführten, linearen oder rotatorischen Bewegung

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE9421715U1 (de) * 1994-11-15 1996-07-25 Klocke Volker Elektromechanische Positioniereinheit
US5668432A (en) * 1995-03-24 1997-09-16 Nippondenso Co., Ltd. Articulation device
US6358749B1 (en) 1997-12-02 2002-03-19 Ozo Diversified Automation, Inc. Automated system for chromosome microdissection and method of using same
DE19806127B4 (de) * 1998-02-14 2005-06-30 Artur Dr. Zrenner Verfahren zur elektrischen Ansteuerung von piezoelektrischen oder elektrostriktiven Aktuatoren in Antrieben für eine schrittweise Bewegung
US7304486B2 (en) * 1998-07-08 2007-12-04 Capres A/S Nano-drive for high resolution positioning and for positioning of a multi-point probe
DE19833905C2 (de) * 1998-07-22 2002-05-08 Hahn Meitner Inst Berlin Gmbh Piezoelektrische Verstelleinrichtung für die Positonierung eines Probentisches
DE19909913B4 (de) 1999-03-06 2004-01-15 NMI Naturwissenschaftliches und Medizinisches Institut an der Universität Tübingen Elektromechanische Antriebsvorrichtung
SE515985C2 (sv) * 1999-06-13 2001-11-05 Nanofactory Instruments Ab Anordning för mikropositionering av objekt genom användning av mekanisk tröghet
US6194813B1 (en) * 1999-09-29 2001-02-27 Jacob Israelachvili Extended-range xyz linear piezo-mechanical scanner for scanning-probe and surface force applications
TW507312B (en) * 2000-02-04 2002-10-21 Philips Electron Optics Bv Particle-optical apparatus, and object carrier therefor
WO2002043526A2 (en) 2000-12-01 2002-06-06 Larson John E Unaligned multiple-column height adjustable pedestals for tables and chairs that tilt and slide
SE520097C2 (sv) * 2000-12-05 2003-05-27 Nanofactory Instruments Ab Mikropositioneringsanordning
DE50101186D1 (de) * 2001-03-09 2004-01-29 Klocke Nanotechnik Positioniereinheit und Positioniereinrichtung mit mindestens zwei Positioniereinheiten
US6848328B2 (en) 2001-03-09 2005-02-01 Klocke Nanotechnik Positioning unit and positioning apparatus with at least two positioning units
US6967335B1 (en) 2002-06-17 2005-11-22 Zyvex Corporation Manipulation system for manipulating a sample under study with a microscope
US6891170B1 (en) 2002-06-17 2005-05-10 Zyvex Corporation Modular manipulation system for manipulating a sample under study with a microscope
JP2007506981A (ja) * 2003-09-23 2007-03-22 ザイベックス コーポレーション Ｆｉｂで調製した試料を把持する素子を使用した顕微鏡検査のための方法、システム、および装置
TW200531420A (en) 2004-02-20 2005-09-16 Zyvex Corp Positioning device for microscopic motion
KR20060043141A (ko) * 2004-02-23 2006-05-15 지벡스 코포레이션 대전 입자 빔 장치 프로브 조작기
US7326293B2 (en) 2004-03-26 2008-02-05 Zyvex Labs, Llc Patterned atomic layer epitaxy
US7122989B2 (en) * 2004-08-05 2006-10-17 Bookham Technology Plc Multiple speed mover assembly
WO2007100296A1 (en) * 2006-03-02 2007-09-07 Nanofactory Instruments Ab Control signal for inertial slider
US8059346B2 (en) 2007-03-19 2011-11-15 New Scale Technologies Linear drive systems and methods thereof
US20100140473A1 (en) * 2007-04-24 2010-06-10 Volker Klocke Nanorobot module, automation and exchange
EP2561541B1 (de) 2010-04-07 2017-02-22 The Governing Council of the University of Toronto Manipulatorträger für elektronenmikroskope
DE102013204131B3 (de) * 2013-03-11 2014-02-06 Bruker Biospin Ag NMR-Probenkopf mit einem mittels eines piezoelektrischen Aktors diskret verstellbaren variablen Kondensator im HF-Schwingkreis

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1280348B (de) * 1963-12-11 1968-10-17 Telefunken Patent Verfahren zur Kontaktierung der inneren Elektrodenzufuehrung von hohlzylindrischen Wandlern
NL7213355A (de) * 1972-10-03 1974-04-05
US4523120A (en) * 1984-06-04 1985-06-11 The United States Of America As Represented By The Secretary Of The Navy Precise bearing support ditherer with piezoelectric drive means
DE3610540A1 (de) * 1986-03-27 1987-10-01 Kernforschungsanlage Juelich Bewegungseinrichtung zur mikrobewegung von objekten
JPS62283542A (ja) * 1986-06-02 1987-12-09 Hitachi Ltd 高速駆動圧電素子搭載陰極
US4871938A (en) * 1988-06-13 1989-10-03 Digital Instruments, Inc. Positioning device for a scanning tunneling microscope
DE3844821C2 (en) * 1988-07-03 1993-07-22 Kfa Juelich Gmbh, 5170 Juelich, De Micromanipulator for raster tunnel microscope
NL8902094A (nl) * 1989-08-18 1991-03-18 Philips Nv Elektro-mechanische transducent en positioneringsinrichting voorzien van een dergelijke elektro-mechanische transducent.
US5198715A (en) * 1990-05-23 1993-03-30 Digital Instruments, Inc. Scanner for scanning probe microscopes having reduced Z-axis non-linearity
JPH0758193B2 (ja) * 1990-09-14 1995-06-21 三菱電機株式会社 原子間力顕微鏡の微動走査機構
GB9027480D0 (en) * 1990-12-19 1991-02-06 Philips Electronic Associated Interferometer

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10148267B4 (de) * 2001-06-08 2005-11-24 Physik Instrumente (Pi) Gmbh & Co. Kg Piezolinearantrieb mit einer Gruppe von Piezostapelaktoren sowie Verfahren zum Betreiben eines solchen Antriebes
DE10148267A1 (de) * 2001-06-12 2003-01-30 Physik Instr Pi Gmbh & Co Kg Piezolinearantrieb mit einer Gruppe von Piezostapelaktoren sowie Verfahren zum Betreiben eines solchen Antriebes
DE102008061666A1 (de) 2008-12-12 2010-06-17 Otto-Von-Guericke-Universität Magdeburg Positionierungsvorrichtung
US9018823B2 (en) 2009-03-18 2015-04-28 Forschungszentrum Juelich Gmbh Apparatus and method for electromechanical positioning
EP2242122A2 (de) 2009-04-16 2010-10-20 Physik Instrumente (PI) GmbH & Co. KG Betriebsverfahren und Ansteuereinrichtung eines Piezolinearantriebes
DE102009017637A1 (de) 2009-04-16 2010-10-28 Physik Instrumente (Pi) Gmbh & Co. Kg Betriebsverfahren und Ansteuereinrichtung eines Piezolinearantriebes
US8466601B2 (en) 2009-04-16 2013-06-18 Physik Instrumente (Pi) Gmbh & Co. Kg Operating method and driving means of a piezolinear drive
EP2916450A1 (de) * 2014-03-03 2015-09-09 Picofine GmbH Antriebsvorrichtung und Verfahren für die Erzeugung einer geführten, linearen oder rotatorischen Bewegung

Also Published As

Publication number Publication date
WO1994006160A1 (en) 1994-03-17
EP0611485B1 (de) 1996-04-03
AU4958493A (en) 1994-03-29
DE69302084D1 (de) 1996-05-09
EP0611485A1 (de) 1994-08-24
US5568004A (en) 1996-10-22

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