DE69302084D1 - Elektromechanische positionierungsvorrichtung. - Google Patents
Elektromechanische positionierungsvorrichtung.Info
- Publication number
- DE69302084D1 DE69302084D1 DE69302084T DE69302084T DE69302084D1 DE 69302084 D1 DE69302084 D1 DE 69302084D1 DE 69302084 T DE69302084 T DE 69302084T DE 69302084 T DE69302084 T DE 69302084T DE 69302084 D1 DE69302084 D1 DE 69302084D1
- Authority
- DE
- Germany
- Prior art keywords
- positioning device
- electromechanical positioning
- electromechanical
- positioning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
- G01Q10/04—Fine scanning or positioning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/003—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
- H02N2/025—Inertial sliding motors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/202—Movement
- H01J2237/20264—Piezoelectric devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/86—Scanning probe structure
- Y10S977/872—Positioner
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Crystallography & Structural Chemistry (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP92202696 | 1992-09-07 | ||
PCT/EP1993/002414 WO1994006160A1 (en) | 1992-09-07 | 1993-09-07 | Electromechanical positioning device |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69302084D1 true DE69302084D1 (de) | 1996-05-09 |
DE69302084T2 DE69302084T2 (de) | 1996-09-12 |
Family
ID=8210895
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69302084T Expired - Lifetime DE69302084T2 (de) | 1992-09-07 | 1993-09-07 | Elektromechanische positionierungsvorrichtung. |
Country Status (5)
Country | Link |
---|---|
US (1) | US5568004A (de) |
EP (1) | EP0611485B1 (de) |
AU (1) | AU4958493A (de) |
DE (1) | DE69302084T2 (de) |
WO (1) | WO1994006160A1 (de) |
Families Citing this family (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE9421715U1 (de) * | 1994-11-15 | 1996-07-25 | Kleindiek, Stephan, 52070 Aachen | Elektromechanische Positioniereinheit |
US5668432A (en) * | 1995-03-24 | 1997-09-16 | Nippondenso Co., Ltd. | Articulation device |
AU1627199A (en) | 1997-12-02 | 1999-06-16 | Ozo Diversified Automation, Inc. | Automated system for chromosome microdissection and method of using same |
DE19806127B4 (de) * | 1998-02-14 | 2005-06-30 | Artur Dr. Zrenner | Verfahren zur elektrischen Ansteuerung von piezoelektrischen oder elektrostriktiven Aktuatoren in Antrieben für eine schrittweise Bewegung |
US7304486B2 (en) * | 1998-07-08 | 2007-12-04 | Capres A/S | Nano-drive for high resolution positioning and for positioning of a multi-point probe |
DE19833905C2 (de) * | 1998-07-22 | 2002-05-08 | Hahn Meitner Inst Berlin Gmbh | Piezoelektrische Verstelleinrichtung für die Positonierung eines Probentisches |
DE19909913B4 (de) | 1999-03-06 | 2004-01-15 | NMI Naturwissenschaftliches und Medizinisches Institut an der Universität Tübingen | Elektromechanische Antriebsvorrichtung |
SE515985C2 (sv) * | 1999-06-13 | 2001-11-05 | Nanofactory Instruments Ab | Anordning för mikropositionering av objekt genom användning av mekanisk tröghet |
US6194813B1 (en) * | 1999-09-29 | 2001-02-27 | Jacob Israelachvili | Extended-range xyz linear piezo-mechanical scanner for scanning-probe and surface force applications |
TW507312B (en) * | 2000-02-04 | 2002-10-21 | Philips Electron Optics Bv | Particle-optical apparatus, and object carrier therefor |
US20020084389A1 (en) | 2000-12-01 | 2002-07-04 | Larson John E. | Unaligned multiple-column height adjustable pedestals for tables and chairs that tilt and slide |
SE520097C2 (sv) * | 2000-12-05 | 2003-05-27 | Nanofactory Instruments Ab | Mikropositioneringsanordning |
DE50101186D1 (de) * | 2001-03-09 | 2004-01-29 | Klocke Nanotechnik | Positioniereinheit und Positioniereinrichtung mit mindestens zwei Positioniereinheiten |
US6848328B2 (en) | 2001-03-09 | 2005-02-01 | Klocke Nanotechnik | Positioning unit and positioning apparatus with at least two positioning units |
DE10148267B4 (de) * | 2001-06-08 | 2005-11-24 | Physik Instrumente (Pi) Gmbh & Co. Kg | Piezolinearantrieb mit einer Gruppe von Piezostapelaktoren sowie Verfahren zum Betreiben eines solchen Antriebes |
US6891170B1 (en) * | 2002-06-17 | 2005-05-10 | Zyvex Corporation | Modular manipulation system for manipulating a sample under study with a microscope |
US6967335B1 (en) | 2002-06-17 | 2005-11-22 | Zyvex Corporation | Manipulation system for manipulating a sample under study with a microscope |
KR100984608B1 (ko) * | 2003-09-23 | 2010-09-30 | 지벡스 인스투르먼츠, 엘엘시 | 집속 이온빔으로 준비한 샘플을 파지하는 파지 요소를 사용한 현미경 검사 방법, 시스템 및 장치 |
TW200531420A (en) | 2004-02-20 | 2005-09-16 | Zyvex Corp | Positioning device for microscopic motion |
DE602005002379T2 (de) * | 2004-02-23 | 2008-06-12 | Zyvex Instruments, LLC, Richardson | Benutzung einer Sonde in einer Teilchenstrahlvorrichtung |
US7326293B2 (en) * | 2004-03-26 | 2008-02-05 | Zyvex Labs, Llc | Patterned atomic layer epitaxy |
US7122989B2 (en) * | 2004-08-05 | 2006-10-17 | Bookham Technology Plc | Multiple speed mover assembly |
EP1989742A1 (de) * | 2006-03-02 | 2008-11-12 | Nanofactory Instruments AB | Steuersignal für trägheits-slider |
US8059346B2 (en) | 2007-03-19 | 2011-11-15 | New Scale Technologies | Linear drive systems and methods thereof |
WO2008128532A2 (de) * | 2007-04-24 | 2008-10-30 | Klocke Nanotechnik | Nanorobotik-modul, automatisierung und wechsel |
DE102008061666A1 (de) | 2008-12-12 | 2010-06-17 | Otto-Von-Guericke-Universität Magdeburg | Positionierungsvorrichtung |
DE102009013849A1 (de) | 2009-03-18 | 2010-09-30 | Forschungszentrum Jülich GmbH | Vorrichtung und Verfahren zur elektromechanischen Positionierung |
DE102009017637A1 (de) | 2009-04-16 | 2010-10-28 | Physik Instrumente (Pi) Gmbh & Co. Kg | Betriebsverfahren und Ansteuereinrichtung eines Piezolinearantriebes |
JP5583263B2 (ja) | 2010-04-07 | 2014-09-03 | ザ ガバニング カウンシル オブ ザ ユニヴァーシティー オブ トロント | 電子顕微鏡用マニピュレーターキャリヤ |
DE102013204131B3 (de) * | 2013-03-11 | 2014-02-06 | Bruker Biospin Ag | NMR-Probenkopf mit einem mittels eines piezoelektrischen Aktors diskret verstellbaren variablen Kondensator im HF-Schwingkreis |
EP2916450B1 (de) * | 2014-03-03 | 2017-06-28 | Picofine GmbH | Antriebsvorrichtung und Verfahren für die Erzeugung einer geführten, linearen oder rotatorischen Bewegung |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1280348B (de) * | 1963-12-11 | 1968-10-17 | Telefunken Patent | Verfahren zur Kontaktierung der inneren Elektrodenzufuehrung von hohlzylindrischen Wandlern |
NL7213355A (de) * | 1972-10-03 | 1974-04-05 | ||
US4523120A (en) * | 1984-06-04 | 1985-06-11 | The United States Of America As Represented By The Secretary Of The Navy | Precise bearing support ditherer with piezoelectric drive means |
DE3610540A1 (de) * | 1986-03-27 | 1987-10-01 | Kernforschungsanlage Juelich | Bewegungseinrichtung zur mikrobewegung von objekten |
JPS62283542A (ja) * | 1986-06-02 | 1987-12-09 | Hitachi Ltd | 高速駆動圧電素子搭載陰極 |
US4871938A (en) * | 1988-06-13 | 1989-10-03 | Digital Instruments, Inc. | Positioning device for a scanning tunneling microscope |
DE3844659A1 (de) * | 1988-07-03 | 1990-11-29 | Forschungszentrum Juelich Gmbh | Mikromanipulator |
NL8902094A (nl) * | 1989-08-18 | 1991-03-18 | Philips Nv | Elektro-mechanische transducent en positioneringsinrichting voorzien van een dergelijke elektro-mechanische transducent. |
US5198715A (en) * | 1990-05-23 | 1993-03-30 | Digital Instruments, Inc. | Scanner for scanning probe microscopes having reduced Z-axis non-linearity |
JPH0758193B2 (ja) * | 1990-09-14 | 1995-06-21 | 三菱電機株式会社 | 原子間力顕微鏡の微動走査機構 |
GB9027480D0 (en) * | 1990-12-19 | 1991-02-06 | Philips Electronic Associated | Interferometer |
-
1993
- 1993-09-07 EP EP93919286A patent/EP0611485B1/de not_active Expired - Lifetime
- 1993-09-07 AU AU49584/93A patent/AU4958493A/en not_active Abandoned
- 1993-09-07 US US08/211,897 patent/US5568004A/en not_active Expired - Lifetime
- 1993-09-07 DE DE69302084T patent/DE69302084T2/de not_active Expired - Lifetime
- 1993-09-07 WO PCT/EP1993/002414 patent/WO1994006160A1/en active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
DE69302084T2 (de) | 1996-09-12 |
AU4958493A (en) | 1994-03-29 |
EP0611485A1 (de) | 1994-08-24 |
EP0611485B1 (de) | 1996-04-03 |
US5568004A (en) | 1996-10-22 |
WO1994006160A1 (en) | 1994-03-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |