GB1338208A - Double pass coaxial cylinder analyzer for charged particles - Google Patents

Double pass coaxial cylinder analyzer for charged particles

Info

Publication number
GB1338208A
GB1338208A GB3659672A GB3659672A GB1338208A GB 1338208 A GB1338208 A GB 1338208A GB 3659672 A GB3659672 A GB 3659672A GB 3659672 A GB3659672 A GB 3659672A GB 1338208 A GB1338208 A GB 1338208A
Authority
GB
United Kingdom
Prior art keywords
cylinders
electrons
plate
analyser
specimen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3659672A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Physical Electronics Inc
Original Assignee
Physical Electronics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Physical Electronics Inc filed Critical Physical Electronics Inc
Publication of GB1338208A publication Critical patent/GB1338208A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/26Mass spectrometers or separator tubes
    • H01J49/28Static spectrometers
    • H01J49/282Static spectrometers using electrostatic analysers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/44Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46Static spectrometers
    • H01J49/48Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/482Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with cylindrical mirrors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/44Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46Static spectrometers
    • H01J49/48Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/484Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with spherical mirrors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
  • Measurement Of Radiation (AREA)

Abstract

1338208 Particle spectrometers PHYSICAL ELECTRONICS INDUSTRIES Inc 4 Aug 1972 [27 Aug 1971] 36596/72 Heading H1D A particle spectrometer for analysing electrons emitted from a specimen 23 comprises two coaxial cylinders 11, 12 between which an electric field is established so that electrons of a certain energy will follow a trajectory 25 through gauze windows 16, 17 an apertured plate 35 and then through further gauge windows 18, 19 to a detector at 42, the input of the analyzer being provided with retarding grids 22, 21 which form parts of concentric spheres centred on a point on the specimen 23 and between which there is a radial retarding field. The effect of the first section of the analyser is to create an artificial point source at the aperture 37 in plate 5. An aperture-plate 39 immediately in front of the detector has a slit in the form of segments of an annulus. The cylinders 11, 12 are spaced by discs 13, 14 which are constructed as described in Specification 1,338,209. The analyser is surrounded by a magnetic shield 15 of Mumetal (Registered Trade Mark). In Fig. 6 (not shown) there is a block diagram of an operating system for the spectrometer in which the potentials of the cylinders 11, 12 and grids 21, 22 are varied to scan the energy spectrum of the electrons while measuring the output and plotting the spectrum on an X-Y recorder.
GB3659672A 1971-08-27 1972-08-04 Double pass coaxial cylinder analyzer for charged particles Expired GB1338208A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US17557571A 1971-08-27 1971-08-27

Publications (1)

Publication Number Publication Date
GB1338208A true GB1338208A (en) 1973-11-21

Family

ID=22640776

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3659672A Expired GB1338208A (en) 1971-08-27 1972-08-04 Double pass coaxial cylinder analyzer for charged particles

Country Status (4)

Country Link
US (1) US3699331A (en)
JP (1) JPS5338948B2 (en)
FR (1) FR2150887B1 (en)
GB (1) GB1338208A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110618443A (en) * 2019-08-26 2019-12-27 北京控制工程研究所 Plasma thruster steady-state ion flow field measuring device and measuring method

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1327572A (en) * 1971-03-23 1973-08-22 Ass Elect Ind Apparatus for use in charged particle spectroscopy
US3870882A (en) * 1973-05-23 1975-03-11 Gca Corp Esca x-ray source
JPS5831700B2 (en) * 1975-06-06 1983-07-07 ニホンシンクウギジユツ カブシキガイシヤ AEON SITSURI YOUBUNSEXOUCHI
US4048498A (en) * 1976-09-01 1977-09-13 Physical Electronics Industries, Inc. Scanning auger microprobe with variable axial aperture
JPS597736Y2 (en) * 1977-02-25 1984-03-09 日本電子株式会社 electron spectrometer
DE2851743C2 (en) * 1978-11-30 1980-08-28 Kernforschungsanlage Juelich Gmbh, 5170 Juelich Electron impact spectrometer
US4224518A (en) * 1978-12-21 1980-09-23 Varian Associates, Inc. Multistage cylindrical mirror analyzer incorporating a coaxial electron gun
US4367406A (en) * 1981-01-13 1983-01-04 Trustees Of Boston University Cylindrical mirror electrostatic energy analyzer free of third-order angular aberrations
US5032724A (en) * 1990-08-09 1991-07-16 The Perkin-Elmer Corporation Multichannel charged-particle analyzer
US6184523B1 (en) * 1998-07-14 2001-02-06 Board Of Regents Of The University Of Nebraska High resolution charged particle-energy detecting, multiple sequential stage, compact, small diameter, retractable cylindrical mirror analyzer system, and method of use
JPWO2008114684A1 (en) * 2007-03-16 2010-07-01 国立大学法人 奈良先端科学技術大学院大学 Energy analyzer, two-dimensional display energy analyzer and photoelectron microscope
GB0720901D0 (en) * 2007-10-24 2007-12-05 Shimadzu Res Lab Europe Ltd Charged particle energy analysers
US8071942B2 (en) 2009-03-20 2011-12-06 Physical Electronics USA, Inc. Sample holder apparatus to reduce energy of electrons in an analyzer system and method
JP5694317B2 (en) * 2009-07-17 2015-04-01 ケーエルエー−テンカー・コーポレーションKla−Tencor Corporation Charged particle energy analyzer apparatus and method
CN106568832A (en) * 2016-10-31 2017-04-19 中国科学院国家空间科学中心 Sensor apparatus for measuring energy and component of space thermal plasma

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3582649A (en) * 1968-10-21 1971-06-01 Varian Associates Retarding field electron diffraction spectrometer having improved resolution
US3596091A (en) * 1969-05-19 1971-07-27 Varian Associates Induced electron emission spectrometer having a unipotential sample chamber
US3631238A (en) * 1969-11-17 1971-12-28 North American Rockwell Method of measuring electric potential on an object surface using auger electron spectroscopy

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110618443A (en) * 2019-08-26 2019-12-27 北京控制工程研究所 Plasma thruster steady-state ion flow field measuring device and measuring method

Also Published As

Publication number Publication date
US3699331A (en) 1972-10-17
DE2241612A1 (en) 1973-03-08
JPS5338948B2 (en) 1978-10-18
JPS4832589A (en) 1973-04-28
FR2150887A1 (en) 1973-04-13
FR2150887B1 (en) 1976-08-13
DE2241612B2 (en) 1976-01-15

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee