JPS53117383A - Production of photo mask - Google Patents

Production of photo mask

Info

Publication number
JPS53117383A
JPS53117383A JP3254877A JP3254877A JPS53117383A JP S53117383 A JPS53117383 A JP S53117383A JP 3254877 A JP3254877 A JP 3254877A JP 3254877 A JP3254877 A JP 3254877A JP S53117383 A JPS53117383 A JP S53117383A
Authority
JP
Japan
Prior art keywords
photo mask
production
durability
potential
plate surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3254877A
Other languages
Japanese (ja)
Inventor
Kazuo Ito
Teruo Iino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP3254877A priority Critical patent/JPS53117383A/en
Publication of JPS53117383A publication Critical patent/JPS53117383A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To rapidly obtain a photo mask having durability and resolution equivalent to those of ordinary hard masks by making use of physical phenomena being the change in the potential, i.e., charge density, on dry plate surface for photo mask through light radiation.
COPYRIGHT: (C)1978,JPO&Japio
JP3254877A 1977-03-23 1977-03-23 Production of photo mask Pending JPS53117383A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3254877A JPS53117383A (en) 1977-03-23 1977-03-23 Production of photo mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3254877A JPS53117383A (en) 1977-03-23 1977-03-23 Production of photo mask

Publications (1)

Publication Number Publication Date
JPS53117383A true JPS53117383A (en) 1978-10-13

Family

ID=12361976

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3254877A Pending JPS53117383A (en) 1977-03-23 1977-03-23 Production of photo mask

Country Status (1)

Country Link
JP (1) JPS53117383A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003050618A1 (en) * 2001-12-11 2003-06-19 Renesas Technology Corp. Method for manufacturing wiring board
JP2007298805A (en) * 2006-05-01 2007-11-15 Seiko Epson Corp Photomask, method for manufacturing photomask, device for manufacturing photomask, and circuit board
CN104244767A (en) * 2012-04-02 2014-12-24 株式会社百客美 Hair measurement tool

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003050618A1 (en) * 2001-12-11 2003-06-19 Renesas Technology Corp. Method for manufacturing wiring board
JP2007298805A (en) * 2006-05-01 2007-11-15 Seiko Epson Corp Photomask, method for manufacturing photomask, device for manufacturing photomask, and circuit board
CN104244767A (en) * 2012-04-02 2014-12-24 株式会社百客美 Hair measurement tool
CN104244767B (en) * 2012-04-02 2017-02-22 株式会社百客美 Hair measurement tool

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