JPS53120528A - Positive type radiation sensitive material - Google Patents

Positive type radiation sensitive material

Info

Publication number
JPS53120528A
JPS53120528A JP3570677A JP3570677A JPS53120528A JP S53120528 A JPS53120528 A JP S53120528A JP 3570677 A JP3570677 A JP 3570677A JP 3570677 A JP3570677 A JP 3570677A JP S53120528 A JPS53120528 A JP S53120528A
Authority
JP
Japan
Prior art keywords
sensitive material
radiation sensitive
positive type
type radiation
alkylisopropenylketone
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3570677A
Other languages
Japanese (ja)
Inventor
Masataka Miyamura
Haruaki Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP3570677A priority Critical patent/JPS53120528A/en
Publication of JPS53120528A publication Critical patent/JPS53120528A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To heighten radiation sensitvity and to easily form a fine and high precision pattern, etc., by using a (halogenated) alkylisopropenylketone (co)polymer.
COPYRIGHT: (C)1978,JPO&Japio
JP3570677A 1977-03-30 1977-03-30 Positive type radiation sensitive material Pending JPS53120528A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3570677A JPS53120528A (en) 1977-03-30 1977-03-30 Positive type radiation sensitive material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3570677A JPS53120528A (en) 1977-03-30 1977-03-30 Positive type radiation sensitive material

Publications (1)

Publication Number Publication Date
JPS53120528A true JPS53120528A (en) 1978-10-21

Family

ID=12449301

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3570677A Pending JPS53120528A (en) 1977-03-30 1977-03-30 Positive type radiation sensitive material

Country Status (1)

Country Link
JP (1) JPS53120528A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63291053A (en) * 1987-05-25 1988-11-28 Nippon Zeon Co Ltd Positive type photoresist composition
JP2003316003A (en) * 2002-02-20 2003-11-06 Canon Inc Resist material
JP2009279935A (en) * 2002-02-20 2009-12-03 Canon Inc Manufacturing process of inkjet recording head

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63291053A (en) * 1987-05-25 1988-11-28 Nippon Zeon Co Ltd Positive type photoresist composition
JP2003316003A (en) * 2002-02-20 2003-11-06 Canon Inc Resist material
JP2009279935A (en) * 2002-02-20 2009-12-03 Canon Inc Manufacturing process of inkjet recording head

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