JPS53120528A - Positive type radiation sensitive material - Google Patents
Positive type radiation sensitive materialInfo
- Publication number
- JPS53120528A JPS53120528A JP3570677A JP3570677A JPS53120528A JP S53120528 A JPS53120528 A JP S53120528A JP 3570677 A JP3570677 A JP 3570677A JP 3570677 A JP3570677 A JP 3570677A JP S53120528 A JPS53120528 A JP S53120528A
- Authority
- JP
- Japan
- Prior art keywords
- sensitive material
- radiation sensitive
- positive type
- type radiation
- alkylisopropenylketone
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To heighten radiation sensitvity and to easily form a fine and high precision pattern, etc., by using a (halogenated) alkylisopropenylketone (co)polymer.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3570677A JPS53120528A (en) | 1977-03-30 | 1977-03-30 | Positive type radiation sensitive material |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3570677A JPS53120528A (en) | 1977-03-30 | 1977-03-30 | Positive type radiation sensitive material |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53120528A true JPS53120528A (en) | 1978-10-21 |
Family
ID=12449301
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3570677A Pending JPS53120528A (en) | 1977-03-30 | 1977-03-30 | Positive type radiation sensitive material |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53120528A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63291053A (en) * | 1987-05-25 | 1988-11-28 | Nippon Zeon Co Ltd | Positive type photoresist composition |
JP2003316003A (en) * | 2002-02-20 | 2003-11-06 | Canon Inc | Resist material |
JP2009279935A (en) * | 2002-02-20 | 2009-12-03 | Canon Inc | Manufacturing process of inkjet recording head |
-
1977
- 1977-03-30 JP JP3570677A patent/JPS53120528A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63291053A (en) * | 1987-05-25 | 1988-11-28 | Nippon Zeon Co Ltd | Positive type photoresist composition |
JP2003316003A (en) * | 2002-02-20 | 2003-11-06 | Canon Inc | Resist material |
JP2009279935A (en) * | 2002-02-20 | 2009-12-03 | Canon Inc | Manufacturing process of inkjet recording head |
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