JPS5381113A - Radiation sensitive material - Google Patents

Radiation sensitive material

Info

Publication number
JPS5381113A
JPS5381113A JP15692676A JP15692676A JPS5381113A JP S5381113 A JPS5381113 A JP S5381113A JP 15692676 A JP15692676 A JP 15692676A JP 15692676 A JP15692676 A JP 15692676A JP S5381113 A JPS5381113 A JP S5381113A
Authority
JP
Japan
Prior art keywords
sensitive material
radiation sensitive
facillitate
employing
minute
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15692676A
Other languages
Japanese (ja)
Inventor
Masataka Miyamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP15692676A priority Critical patent/JPS5381113A/en
Publication of JPS5381113A publication Critical patent/JPS5381113A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To facillitate a minute and highly precise pattern or the like to be formed, by employing a specified ring opening polymerization produce for a positive type radiation sensitive material.
COPYRIGHT: (C)1978,JPO&Japio
JP15692676A 1976-12-25 1976-12-25 Radiation sensitive material Pending JPS5381113A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15692676A JPS5381113A (en) 1976-12-25 1976-12-25 Radiation sensitive material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15692676A JPS5381113A (en) 1976-12-25 1976-12-25 Radiation sensitive material

Publications (1)

Publication Number Publication Date
JPS5381113A true JPS5381113A (en) 1978-07-18

Family

ID=15638380

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15692676A Pending JPS5381113A (en) 1976-12-25 1976-12-25 Radiation sensitive material

Country Status (1)

Country Link
JP (1) JPS5381113A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2589862A1 (en) * 1985-11-13 1987-05-15 Rhone Poulenc Sante 3,4-Epoxy-3-methyl-3-butenenitrile, its preparation and its use in the synthesis of vitamin A

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2589862A1 (en) * 1985-11-13 1987-05-15 Rhone Poulenc Sante 3,4-Epoxy-3-methyl-3-butenenitrile, its preparation and its use in the synthesis of vitamin A

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