JPS5359370A - Positioning method - Google Patents
Positioning methodInfo
- Publication number
- JPS5359370A JPS5359370A JP13404876A JP13404876A JPS5359370A JP S5359370 A JPS5359370 A JP S5359370A JP 13404876 A JP13404876 A JP 13404876A JP 13404876 A JP13404876 A JP 13404876A JP S5359370 A JPS5359370 A JP S5359370A
- Authority
- JP
- Japan
- Prior art keywords
- positioning
- positioning method
- wothout
- photoetching
- deteriorating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To perform the positioning between a mask and a wafer for photoetching with reducing considerably the occupied area of the positioning pattern and wothout deteriorating the positioning accuracy between plural photomasks and a substrate.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13404876A JPS5359370A (en) | 1976-11-10 | 1976-11-10 | Positioning method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13404876A JPS5359370A (en) | 1976-11-10 | 1976-11-10 | Positioning method |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59027051A Division JPS59161033A (en) | 1984-02-17 | 1984-02-17 | Photo mask |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5359370A true JPS5359370A (en) | 1978-05-29 |
Family
ID=15119134
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13404876A Pending JPS5359370A (en) | 1976-11-10 | 1976-11-10 | Positioning method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5359370A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54157478A (en) * | 1978-06-01 | 1979-12-12 | Canon Inc | Alignment method |
JPS6028249A (en) * | 1983-07-27 | 1985-02-13 | Oki Electric Ind Co Ltd | Mask substrate with mask alignment chip |
-
1976
- 1976-11-10 JP JP13404876A patent/JPS5359370A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54157478A (en) * | 1978-06-01 | 1979-12-12 | Canon Inc | Alignment method |
JPS63942B2 (en) * | 1978-06-01 | 1988-01-09 | Canon Kk | |
JPS6028249A (en) * | 1983-07-27 | 1985-02-13 | Oki Electric Ind Co Ltd | Mask substrate with mask alignment chip |
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