JPS51148363A - Manufacturing method of semiconductor device - Google Patents

Manufacturing method of semiconductor device

Info

Publication number
JPS51148363A
JPS51148363A JP7194575A JP7194575A JPS51148363A JP S51148363 A JPS51148363 A JP S51148363A JP 7194575 A JP7194575 A JP 7194575A JP 7194575 A JP7194575 A JP 7194575A JP S51148363 A JPS51148363 A JP S51148363A
Authority
JP
Japan
Prior art keywords
manufacturing
semiconductor device
masling
distortion
covering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7194575A
Other languages
Japanese (ja)
Inventor
Yoichi Tamaoki
Masahiko Kogirima
Koji Honma
Masao Kawamura
Kazuhiro Kurata
Michio Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7194575A priority Critical patent/JPS51148363A/en
Publication of JPS51148363A publication Critical patent/JPS51148363A/en
Pending legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Weting (AREA)

Abstract

PURPOSE: To maintain the distortion easing effect of a lower film by covering the inside fringe part of the opening as a processing hole with an upper film material with the large masling operation when the semiconductor processing using a double layer construction mask is done.
COPYRIGHT: (C)1976,JPO&Japio
JP7194575A 1975-06-16 1975-06-16 Manufacturing method of semiconductor device Pending JPS51148363A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7194575A JPS51148363A (en) 1975-06-16 1975-06-16 Manufacturing method of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7194575A JPS51148363A (en) 1975-06-16 1975-06-16 Manufacturing method of semiconductor device

Publications (1)

Publication Number Publication Date
JPS51148363A true JPS51148363A (en) 1976-12-20

Family

ID=13475128

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7194575A Pending JPS51148363A (en) 1975-06-16 1975-06-16 Manufacturing method of semiconductor device

Country Status (1)

Country Link
JP (1) JPS51148363A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03229419A (en) * 1990-02-02 1991-10-11 Sharp Corp Manufacture of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03229419A (en) * 1990-02-02 1991-10-11 Sharp Corp Manufacture of semiconductor device

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