JPS51148363A - Manufacturing method of semiconductor device - Google Patents
Manufacturing method of semiconductor deviceInfo
- Publication number
- JPS51148363A JPS51148363A JP7194575A JP7194575A JPS51148363A JP S51148363 A JPS51148363 A JP S51148363A JP 7194575 A JP7194575 A JP 7194575A JP 7194575 A JP7194575 A JP 7194575A JP S51148363 A JPS51148363 A JP S51148363A
- Authority
- JP
- Japan
- Prior art keywords
- manufacturing
- semiconductor device
- masling
- distortion
- covering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Local Oxidation Of Silicon (AREA)
- Weting (AREA)
Abstract
PURPOSE: To maintain the distortion easing effect of a lower film by covering the inside fringe part of the opening as a processing hole with an upper film material with the large masling operation when the semiconductor processing using a double layer construction mask is done.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7194575A JPS51148363A (en) | 1975-06-16 | 1975-06-16 | Manufacturing method of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7194575A JPS51148363A (en) | 1975-06-16 | 1975-06-16 | Manufacturing method of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51148363A true JPS51148363A (en) | 1976-12-20 |
Family
ID=13475128
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7194575A Pending JPS51148363A (en) | 1975-06-16 | 1975-06-16 | Manufacturing method of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51148363A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03229419A (en) * | 1990-02-02 | 1991-10-11 | Sharp Corp | Manufacture of semiconductor device |
-
1975
- 1975-06-16 JP JP7194575A patent/JPS51148363A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03229419A (en) * | 1990-02-02 | 1991-10-11 | Sharp Corp | Manufacture of semiconductor device |
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