JPS541625B2 - - Google Patents

Info

Publication number
JPS541625B2
JPS541625B2 JP8796876A JP8796876A JPS541625B2 JP S541625 B2 JPS541625 B2 JP S541625B2 JP 8796876 A JP8796876 A JP 8796876A JP 8796876 A JP8796876 A JP 8796876A JP S541625 B2 JPS541625 B2 JP S541625B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8796876A
Other languages
Japanese (ja)
Other versions
JPS5313879A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8796876A priority Critical patent/JPS5313879A/en
Publication of JPS5313879A publication Critical patent/JPS5313879A/en
Publication of JPS541625B2 publication Critical patent/JPS541625B2/ja
Granted legal-status Critical Current

Links

JP8796876A 1976-07-23 1976-07-23 Silicon mask for x-ray exposure and its production Granted JPS5313879A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8796876A JPS5313879A (en) 1976-07-23 1976-07-23 Silicon mask for x-ray exposure and its production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8796876A JPS5313879A (en) 1976-07-23 1976-07-23 Silicon mask for x-ray exposure and its production

Publications (2)

Publication Number Publication Date
JPS5313879A JPS5313879A (en) 1978-02-07
JPS541625B2 true JPS541625B2 (en) 1979-01-26

Family

ID=13929643

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8796876A Granted JPS5313879A (en) 1976-07-23 1976-07-23 Silicon mask for x-ray exposure and its production

Country Status (1)

Country Link
JP (1) JPS5313879A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55127559A (en) * 1979-03-26 1980-10-02 Fujitsu Ltd Blank mask for x-ray exposure and using method therefor

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5057656A (en) * 1973-09-17 1975-05-20
JPS52117558A (en) * 1976-03-30 1977-10-03 Toshiba Corp Soft x-ray exposure mask and its manufacturing method

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5057656A (en) * 1973-09-17 1975-05-20
JPS52117558A (en) * 1976-03-30 1977-10-03 Toshiba Corp Soft x-ray exposure mask and its manufacturing method

Also Published As

Publication number Publication date
JPS5313879A (en) 1978-02-07

Similar Documents

Publication Publication Date Title
JPS5718290B2 (en)
JPS5444636B2 (en)
FR2372778B2 (en)
FR2370644B3 (en)
FR2345612B1 (en)
JPS5711266Y2 (en)
JPS5391768U (en)
JPS567179Y2 (en)
FR2350536B1 (en)
JPS52136395U (en)
JPS5339694U (en)
JPS52132996U (en)
CS175927B1 (en)
DD126753A2 (en)
CH612124A5 (en)
CH601685A5 (en)
DD124505A1 (en)
DD123718A1 (en)
CH614076A5 (en)
DD123975A1 (en)
CH613947A5 (en)
CH601062A5 (en)
DD127355A1 (en)
DD126860A1 (en)
DD123554A1 (en)