JPS5420675A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5420675A
JPS5420675A JP8514077A JP8514077A JPS5420675A JP S5420675 A JPS5420675 A JP S5420675A JP 8514077 A JP8514077 A JP 8514077A JP 8514077 A JP8514077 A JP 8514077A JP S5420675 A JPS5420675 A JP S5420675A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
emitter
mask
high frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8514077A
Other languages
Japanese (ja)
Inventor
Yukinobu Miwa
Tamotsu Ohata
Takeshi Kuramoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP8514077A priority Critical patent/JPS5420675A/en
Publication of JPS5420675A publication Critical patent/JPS5420675A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To produce high frequency elements of less variations with good reproducibility by providing a Si3N4 mask on emitter and base layers and ion implanting, thereafter performing thermal oxidation thereby forming an emitter of an extremely narrow width under the mask.
COPYRIGHT: (C)1979,JPO&Japio
JP8514077A 1977-07-18 1977-07-18 Production of semiconductor device Pending JPS5420675A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8514077A JPS5420675A (en) 1977-07-18 1977-07-18 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8514077A JPS5420675A (en) 1977-07-18 1977-07-18 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5420675A true JPS5420675A (en) 1979-02-16

Family

ID=13850343

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8514077A Pending JPS5420675A (en) 1977-07-18 1977-07-18 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5420675A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59149055A (en) * 1983-02-12 1984-08-25 アイテイ−テイ−・インダストリ−ズ・インコ−ポレ−テツド Method of producing bipolar planar transistor
JPS6149471A (en) * 1984-08-17 1986-03-11 Sanyo Electric Co Ltd Manufacture of semiconductor device
JPS61135160A (en) * 1984-12-05 1986-06-23 Mitsubishi Electric Corp Manufacture of transistor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59149055A (en) * 1983-02-12 1984-08-25 アイテイ−テイ−・インダストリ−ズ・インコ−ポレ−テツド Method of producing bipolar planar transistor
JPS6149471A (en) * 1984-08-17 1986-03-11 Sanyo Electric Co Ltd Manufacture of semiconductor device
JPS61135160A (en) * 1984-12-05 1986-06-23 Mitsubishi Electric Corp Manufacture of transistor

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