JPS5420675A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5420675A JPS5420675A JP8514077A JP8514077A JPS5420675A JP S5420675 A JPS5420675 A JP S5420675A JP 8514077 A JP8514077 A JP 8514077A JP 8514077 A JP8514077 A JP 8514077A JP S5420675 A JPS5420675 A JP S5420675A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- emitter
- mask
- high frequency
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To produce high frequency elements of less variations with good reproducibility by providing a Si3N4 mask on emitter and base layers and ion implanting, thereafter performing thermal oxidation thereby forming an emitter of an extremely narrow width under the mask.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8514077A JPS5420675A (en) | 1977-07-18 | 1977-07-18 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8514077A JPS5420675A (en) | 1977-07-18 | 1977-07-18 | Production of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5420675A true JPS5420675A (en) | 1979-02-16 |
Family
ID=13850343
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8514077A Pending JPS5420675A (en) | 1977-07-18 | 1977-07-18 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5420675A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59149055A (en) * | 1983-02-12 | 1984-08-25 | アイテイ−テイ−・インダストリ−ズ・インコ−ポレ−テツド | Method of producing bipolar planar transistor |
JPS6149471A (en) * | 1984-08-17 | 1986-03-11 | Sanyo Electric Co Ltd | Manufacture of semiconductor device |
JPS61135160A (en) * | 1984-12-05 | 1986-06-23 | Mitsubishi Electric Corp | Manufacture of transistor |
-
1977
- 1977-07-18 JP JP8514077A patent/JPS5420675A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59149055A (en) * | 1983-02-12 | 1984-08-25 | アイテイ−テイ−・インダストリ−ズ・インコ−ポレ−テツド | Method of producing bipolar planar transistor |
JPS6149471A (en) * | 1984-08-17 | 1986-03-11 | Sanyo Electric Co Ltd | Manufacture of semiconductor device |
JPS61135160A (en) * | 1984-12-05 | 1986-06-23 | Mitsubishi Electric Corp | Manufacture of transistor |
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