JPS5290271A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5290271A
JPS5290271A JP676176A JP676176A JPS5290271A JP S5290271 A JPS5290271 A JP S5290271A JP 676176 A JP676176 A JP 676176A JP 676176 A JP676176 A JP 676176A JP S5290271 A JPS5290271 A JP S5290271A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
oxide
differneces
implanting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP676176A
Other languages
Japanese (ja)
Inventor
Masahide Kudo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP676176A priority Critical patent/JPS5290271A/en
Publication of JPS5290271A publication Critical patent/JPS5290271A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To perform fine patterning down to the extreme limit of the accuracy of a mask by ion-implanting, in required pattern form, to an oxide in an atmosphere containing a doping material for the oxide and using the differneces in the rate of etching.
COPYRIGHT: (C)1977,JPO&Japio
JP676176A 1976-01-23 1976-01-23 Production of semiconductor device Pending JPS5290271A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP676176A JPS5290271A (en) 1976-01-23 1976-01-23 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP676176A JPS5290271A (en) 1976-01-23 1976-01-23 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5290271A true JPS5290271A (en) 1977-07-29

Family

ID=11647150

Family Applications (1)

Application Number Title Priority Date Filing Date
JP676176A Pending JPS5290271A (en) 1976-01-23 1976-01-23 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5290271A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007111831A (en) * 2005-10-21 2007-05-10 Seiko Epson Corp Method for manufacturing mems element, and mems element

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007111831A (en) * 2005-10-21 2007-05-10 Seiko Epson Corp Method for manufacturing mems element, and mems element

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