JPS5290271A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5290271A JPS5290271A JP676176A JP676176A JPS5290271A JP S5290271 A JPS5290271 A JP S5290271A JP 676176 A JP676176 A JP 676176A JP 676176 A JP676176 A JP 676176A JP S5290271 A JPS5290271 A JP S5290271A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- oxide
- differneces
- implanting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To perform fine patterning down to the extreme limit of the accuracy of a mask by ion-implanting, in required pattern form, to an oxide in an atmosphere containing a doping material for the oxide and using the differneces in the rate of etching.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP676176A JPS5290271A (en) | 1976-01-23 | 1976-01-23 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP676176A JPS5290271A (en) | 1976-01-23 | 1976-01-23 | Production of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5290271A true JPS5290271A (en) | 1977-07-29 |
Family
ID=11647150
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP676176A Pending JPS5290271A (en) | 1976-01-23 | 1976-01-23 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5290271A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007111831A (en) * | 2005-10-21 | 2007-05-10 | Seiko Epson Corp | Method for manufacturing mems element, and mems element |
-
1976
- 1976-01-23 JP JP676176A patent/JPS5290271A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007111831A (en) * | 2005-10-21 | 2007-05-10 | Seiko Epson Corp | Method for manufacturing mems element, and mems element |
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