JPS5285465A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5285465A
JPS5285465A JP149076A JP149076A JPS5285465A JP S5285465 A JPS5285465 A JP S5285465A JP 149076 A JP149076 A JP 149076A JP 149076 A JP149076 A JP 149076A JP S5285465 A JPS5285465 A JP S5285465A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
cations
silicon
contained
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP149076A
Other languages
Japanese (ja)
Other versions
JPS6112370B2 (en
Inventor
Yasuhiro Mochizuki
Yutaka Misawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP149076A priority Critical patent/JPS5285465A/en
Publication of JPS5285465A publication Critical patent/JPS5285465A/en
Publication of JPS6112370B2 publication Critical patent/JPS6112370B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE: A process for producing semiconductor devices wherein cations are contained in the treating atmosphere at the time of forming a silicon oxide film by thermal oxidation of the surface of a silicon semiconductor is obtained.
COPYRIGHT: (C)1977,JPO&Japio
JP149076A 1976-01-09 1976-01-09 Production of semiconductor device Granted JPS5285465A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP149076A JPS5285465A (en) 1976-01-09 1976-01-09 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP149076A JPS5285465A (en) 1976-01-09 1976-01-09 Production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5285465A true JPS5285465A (en) 1977-07-15
JPS6112370B2 JPS6112370B2 (en) 1986-04-08

Family

ID=11502881

Family Applications (1)

Application Number Title Priority Date Filing Date
JP149076A Granted JPS5285465A (en) 1976-01-09 1976-01-09 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5285465A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5896096U (en) * 1981-12-22 1983-06-29 株式会社東芝 Centrifugal blower
JPS58103087U (en) * 1981-12-29 1983-07-13 松下電工株式会社 Structure of display device

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
APPLIED PHYSICS LETTERS=1972 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5896096U (en) * 1981-12-22 1983-06-29 株式会社東芝 Centrifugal blower
JPS58103087U (en) * 1981-12-29 1983-07-13 松下電工株式会社 Structure of display device

Also Published As

Publication number Publication date
JPS6112370B2 (en) 1986-04-08

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