JPS5285465A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5285465A JPS5285465A JP149076A JP149076A JPS5285465A JP S5285465 A JPS5285465 A JP S5285465A JP 149076 A JP149076 A JP 149076A JP 149076 A JP149076 A JP 149076A JP S5285465 A JPS5285465 A JP S5285465A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- cations
- silicon
- contained
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: A process for producing semiconductor devices wherein cations are contained in the treating atmosphere at the time of forming a silicon oxide film by thermal oxidation of the surface of a silicon semiconductor is obtained.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP149076A JPS5285465A (en) | 1976-01-09 | 1976-01-09 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP149076A JPS5285465A (en) | 1976-01-09 | 1976-01-09 | Production of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5285465A true JPS5285465A (en) | 1977-07-15 |
JPS6112370B2 JPS6112370B2 (en) | 1986-04-08 |
Family
ID=11502881
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP149076A Granted JPS5285465A (en) | 1976-01-09 | 1976-01-09 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5285465A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5896096U (en) * | 1981-12-22 | 1983-06-29 | 株式会社東芝 | Centrifugal blower |
JPS58103087U (en) * | 1981-12-29 | 1983-07-13 | 松下電工株式会社 | Structure of display device |
-
1976
- 1976-01-09 JP JP149076A patent/JPS5285465A/en active Granted
Non-Patent Citations (1)
Title |
---|
APPLIED PHYSICS LETTERS=1972 * |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5896096U (en) * | 1981-12-22 | 1983-06-29 | 株式会社東芝 | Centrifugal blower |
JPS58103087U (en) * | 1981-12-29 | 1983-07-13 | 松下電工株式会社 | Structure of display device |
Also Published As
Publication number | Publication date |
---|---|
JPS6112370B2 (en) | 1986-04-08 |
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