JPS5255379A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS5255379A
JPS5255379A JP13036975A JP13036975A JPS5255379A JP S5255379 A JPS5255379 A JP S5255379A JP 13036975 A JP13036975 A JP 13036975A JP 13036975 A JP13036975 A JP 13036975A JP S5255379 A JPS5255379 A JP S5255379A
Authority
JP
Japan
Prior art keywords
patterns
semiconductor
photoetching
cause
small square
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13036975A
Other languages
Japanese (ja)
Other versions
JPS5947474B2 (en
Inventor
Hiroshi Iwai
Shigeharu Horiuchi
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP50130369A priority Critical patent/JPS5947474B2/ja
Publication of JPS5255379A publication Critical patent/JPS5255379A/en
Publication of JPS5947474B2 publication Critical patent/JPS5947474B2/ja
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To obtain a photoetching method for fine patterns that do not cause p-n junction failure by making slender rectangular patterns to small square-like patterns.
COPYRIGHT: (C)1977,JPO&Japio
JP50130369A 1975-10-31 1975-10-31 Expired JPS5947474B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50130369A JPS5947474B2 (en) 1975-10-31 1975-10-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50130369A JPS5947474B2 (en) 1975-10-31 1975-10-31

Related Child Applications (3)

Application Number Title Priority Date Filing Date
JP60195756A Division JPS6233746B2 (en) 1985-09-06 1985-09-06
JP9469586A Division JPS6263473A (en) 1986-04-25 1986-04-25 Semiconductor device
JP9469686A Division JPS6263474A (en) 1986-04-25 1986-04-25 Semiconductor device

Publications (2)

Publication Number Publication Date
JPS5255379A true JPS5255379A (en) 1977-05-06
JPS5947474B2 JPS5947474B2 (en) 1984-11-19

Family

ID=15032718

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50130369A Expired JPS5947474B2 (en) 1975-10-31 1975-10-31

Country Status (1)

Country Link
JP (1) JPS5947474B2 (en)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55113376A (en) * 1979-02-22 1980-09-01 Nec Corp Manufacturing method of semiconductor device
JPS5664467A (en) * 1979-10-31 1981-06-01 Chiyou Lsi Gijutsu Kenkyu Kumiai Mos type semiconductor device
JPS57132341A (en) * 1981-02-09 1982-08-16 Pioneer Electronic Corp Multilayer wiring structure in semiconductor device
JPS57172752A (en) * 1981-04-16 1982-10-23 Fujitsu Ltd Semiconductor device
JPS57176760A (en) * 1981-04-14 1982-10-30 Fujitsu Ltd Semiconductor device
JPS58213450A (en) * 1982-06-04 1983-12-12 Toshiba Corp Structure of multilayer wiring of semiconductor device
JPS59121857A (en) * 1982-12-28 1984-07-14 Fujitsu Ltd Semiconductor device
JPS6076160A (en) * 1983-10-03 1985-04-30 Seiko Epson Corp Mos type semiconductor integrated circuit
JPS60192350A (en) * 1984-12-12 1985-09-30 Oki Electric Ind Co Ltd Semiconductor integrated circuit device
JPH06283608A (en) * 1993-09-27 1994-10-07 Toshiba Corp Semiconductor device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4424427Y1 (en) * 1967-01-31 1969-10-15

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4424427Y1 (en) * 1967-01-31 1969-10-15

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55113376A (en) * 1979-02-22 1980-09-01 Nec Corp Manufacturing method of semiconductor device
JPH033387B2 (en) * 1979-02-22 1991-01-18 Nippon Electric Co
JPS5664467A (en) * 1979-10-31 1981-06-01 Chiyou Lsi Gijutsu Kenkyu Kumiai Mos type semiconductor device
JPS57132341A (en) * 1981-02-09 1982-08-16 Pioneer Electronic Corp Multilayer wiring structure in semiconductor device
JPS57176760A (en) * 1981-04-14 1982-10-30 Fujitsu Ltd Semiconductor device
JPS57172752A (en) * 1981-04-16 1982-10-23 Fujitsu Ltd Semiconductor device
JPS6343895B2 (en) * 1982-06-04 1988-09-01 Tokyo Shibaura Electric Co
JPS58213450A (en) * 1982-06-04 1983-12-12 Toshiba Corp Structure of multilayer wiring of semiconductor device
US4587549A (en) * 1982-06-04 1986-05-06 Tokyo Shibaura Denki Kabushiki Kaisha Multilayer interconnection structure for semiconductor device
JPS59121857A (en) * 1982-12-28 1984-07-14 Fujitsu Ltd Semiconductor device
JPS6347338B2 (en) * 1982-12-28 1988-09-21 Fujitsu Ltd
JPS6076160A (en) * 1983-10-03 1985-04-30 Seiko Epson Corp Mos type semiconductor integrated circuit
JPS6223460B2 (en) * 1984-12-12 1987-05-22 Oki Electric Ind Co Ltd
JPS60192350A (en) * 1984-12-12 1985-09-30 Oki Electric Ind Co Ltd Semiconductor integrated circuit device
JPH06283608A (en) * 1993-09-27 1994-10-07 Toshiba Corp Semiconductor device

Also Published As

Publication number Publication date
JPS5947474B2 (en) 1984-11-19

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