JPS53119685A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS53119685A JPS53119685A JP3557377A JP3557377A JPS53119685A JP S53119685 A JPS53119685 A JP S53119685A JP 3557377 A JP3557377 A JP 3557377A JP 3557377 A JP3557377 A JP 3557377A JP S53119685 A JPS53119685 A JP S53119685A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- doping
- impurity
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Bipolar Transistors (AREA)
Abstract
PURPOSE: To make graft bases by doping an impurity through the poly-Si film selectively formed on a Si substrate, performing heat-treatment to provide base and emitter layers and performing thermal oxidation by using a Si3N4 mask.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3557377A JPS53119685A (en) | 1977-03-29 | 1977-03-29 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3557377A JPS53119685A (en) | 1977-03-29 | 1977-03-29 | Production of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53119685A true JPS53119685A (en) | 1978-10-19 |
Family
ID=12445491
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3557377A Pending JPS53119685A (en) | 1977-03-29 | 1977-03-29 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53119685A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59198758A (en) * | 1983-04-26 | 1984-11-10 | Nec Corp | Manufacture of semiconductor device |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4982281A (en) * | 1972-12-11 | 1974-08-08 | ||
JPS5154365A (en) * | 1974-11-06 | 1976-05-13 | Mitsubishi Electric Corp | Handotaisochino seizohoho |
JPS51130174A (en) * | 1975-05-06 | 1976-11-12 | Matsushita Electric Ind Co Ltd | Semiconductor device process |
-
1977
- 1977-03-29 JP JP3557377A patent/JPS53119685A/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4982281A (en) * | 1972-12-11 | 1974-08-08 | ||
JPS5154365A (en) * | 1974-11-06 | 1976-05-13 | Mitsubishi Electric Corp | Handotaisochino seizohoho |
JPS51130174A (en) * | 1975-05-06 | 1976-11-12 | Matsushita Electric Ind Co Ltd | Semiconductor device process |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59198758A (en) * | 1983-04-26 | 1984-11-10 | Nec Corp | Manufacture of semiconductor device |
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