JPS5396761A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5396761A
JPS5396761A JP1071477A JP1071477A JPS5396761A JP S5396761 A JPS5396761 A JP S5396761A JP 1071477 A JP1071477 A JP 1071477A JP 1071477 A JP1071477 A JP 1071477A JP S5396761 A JPS5396761 A JP S5396761A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
bird
peaks
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1071477A
Other languages
Japanese (ja)
Inventor
Yoichi Tamaoki
Seiichi Isomae
Mitsuo Nanba
Michiyoshi Maki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1071477A priority Critical patent/JPS5396761A/en
Publication of JPS5396761A publication Critical patent/JPS5396761A/en
Pending legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)

Abstract

PURPOSE: To prevent bird peaks and bird heads by directing forming a Si3N4 film to a Si substrate and selectively oxidizing the same under limited temperature conditions.
COPYRIGHT: (C)1978,JPO&Japio
JP1071477A 1977-02-04 1977-02-04 Production of semiconductor device Pending JPS5396761A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1071477A JPS5396761A (en) 1977-02-04 1977-02-04 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1071477A JPS5396761A (en) 1977-02-04 1977-02-04 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5396761A true JPS5396761A (en) 1978-08-24

Family

ID=11757959

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1071477A Pending JPS5396761A (en) 1977-02-04 1977-02-04 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5396761A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011155009A1 (en) * 2010-06-08 2011-12-15 パナソニック株式会社 Solid-state image pickup device and method for manufacturing same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011155009A1 (en) * 2010-06-08 2011-12-15 パナソニック株式会社 Solid-state image pickup device and method for manufacturing same

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