JPS5427372A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5427372A JPS5427372A JP9277977A JP9277977A JPS5427372A JP S5427372 A JPS5427372 A JP S5427372A JP 9277977 A JP9277977 A JP 9277977A JP 9277977 A JP9277977 A JP 9277977A JP S5427372 A JPS5427372 A JP S5427372A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- wiring
- minute
- density
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Weting (AREA)
Abstract
PURPOSE: To obtain a high-density and minute Al wiring by using the polycrystal silicon for the mask component of the Al photo etching.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9277977A JPS5427372A (en) | 1977-08-02 | 1977-08-02 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9277977A JPS5427372A (en) | 1977-08-02 | 1977-08-02 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5427372A true JPS5427372A (en) | 1979-03-01 |
Family
ID=14063898
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9277977A Pending JPS5427372A (en) | 1977-08-02 | 1977-08-02 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5427372A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2006004126A1 (en) * | 2004-07-06 | 2006-01-12 | Toshiba Tec Kabushiki Kaisha | Vacuum cleaner |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52147084A (en) * | 1976-06-02 | 1977-12-07 | Hitachi Ltd | Production of semiconductor device |
-
1977
- 1977-08-02 JP JP9277977A patent/JPS5427372A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52147084A (en) * | 1976-06-02 | 1977-12-07 | Hitachi Ltd | Production of semiconductor device |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2006004126A1 (en) * | 2004-07-06 | 2006-01-12 | Toshiba Tec Kabushiki Kaisha | Vacuum cleaner |
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