JPS5427372A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5427372A
JPS5427372A JP9277977A JP9277977A JPS5427372A JP S5427372 A JPS5427372 A JP S5427372A JP 9277977 A JP9277977 A JP 9277977A JP 9277977 A JP9277977 A JP 9277977A JP S5427372 A JPS5427372 A JP S5427372A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
wiring
minute
density
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9277977A
Other languages
Japanese (ja)
Inventor
Yoshihiro Maeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP9277977A priority Critical patent/JPS5427372A/en
Publication of JPS5427372A publication Critical patent/JPS5427372A/en
Pending legal-status Critical Current

Links

Landscapes

  • Weting (AREA)

Abstract

PURPOSE: To obtain a high-density and minute Al wiring by using the polycrystal silicon for the mask component of the Al photo etching.
COPYRIGHT: (C)1979,JPO&Japio
JP9277977A 1977-08-02 1977-08-02 Manufacture of semiconductor device Pending JPS5427372A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9277977A JPS5427372A (en) 1977-08-02 1977-08-02 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9277977A JPS5427372A (en) 1977-08-02 1977-08-02 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5427372A true JPS5427372A (en) 1979-03-01

Family

ID=14063898

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9277977A Pending JPS5427372A (en) 1977-08-02 1977-08-02 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5427372A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006004126A1 (en) * 2004-07-06 2006-01-12 Toshiba Tec Kabushiki Kaisha Vacuum cleaner

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52147084A (en) * 1976-06-02 1977-12-07 Hitachi Ltd Production of semiconductor device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52147084A (en) * 1976-06-02 1977-12-07 Hitachi Ltd Production of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006004126A1 (en) * 2004-07-06 2006-01-12 Toshiba Tec Kabushiki Kaisha Vacuum cleaner

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