JPS5429978A - Carrier device for semiconductor wafer and mask - Google Patents
Carrier device for semiconductor wafer and maskInfo
- Publication number
- JPS5429978A JPS5429978A JP9506577A JP9506577A JPS5429978A JP S5429978 A JPS5429978 A JP S5429978A JP 9506577 A JP9506577 A JP 9506577A JP 9506577 A JP9506577 A JP 9506577A JP S5429978 A JPS5429978 A JP S5429978A
- Authority
- JP
- Japan
- Prior art keywords
- mask
- carrier device
- semiconductor wafer
- axes
- screws
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
PURPOSE: To obtain a carrier device which is able to supply and extract a substrate and mask automatically, and also to position the mask to three axes X, Y and θ by screws.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9506577A JPS5429978A (en) | 1977-08-10 | 1977-08-10 | Carrier device for semiconductor wafer and mask |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9506577A JPS5429978A (en) | 1977-08-10 | 1977-08-10 | Carrier device for semiconductor wafer and mask |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5429978A true JPS5429978A (en) | 1979-03-06 |
Family
ID=14127597
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9506577A Pending JPS5429978A (en) | 1977-08-10 | 1977-08-10 | Carrier device for semiconductor wafer and mask |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5429978A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55121640A (en) * | 1979-03-13 | 1980-09-18 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Mask alignment method |
JPS57183031A (en) * | 1981-05-06 | 1982-11-11 | Toshiba Corp | Method for wafer exposure and device thereof |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4984790A (en) * | 1972-12-22 | 1974-08-14 |
-
1977
- 1977-08-10 JP JP9506577A patent/JPS5429978A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4984790A (en) * | 1972-12-22 | 1974-08-14 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55121640A (en) * | 1979-03-13 | 1980-09-18 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Mask alignment method |
JPS57183031A (en) * | 1981-05-06 | 1982-11-11 | Toshiba Corp | Method for wafer exposure and device thereof |
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