JPS5429978A - Carrier device for semiconductor wafer and mask - Google Patents

Carrier device for semiconductor wafer and mask

Info

Publication number
JPS5429978A
JPS5429978A JP9506577A JP9506577A JPS5429978A JP S5429978 A JPS5429978 A JP S5429978A JP 9506577 A JP9506577 A JP 9506577A JP 9506577 A JP9506577 A JP 9506577A JP S5429978 A JPS5429978 A JP S5429978A
Authority
JP
Japan
Prior art keywords
mask
carrier device
semiconductor wafer
axes
screws
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9506577A
Other languages
Japanese (ja)
Inventor
Masayoshi Serizawa
Ryuichi Funatsu
Minoru Ikeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9506577A priority Critical patent/JPS5429978A/en
Publication of JPS5429978A publication Critical patent/JPS5429978A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To obtain a carrier device which is able to supply and extract a substrate and mask automatically, and also to position the mask to three axes X, Y and θ by screws.
COPYRIGHT: (C)1979,JPO&Japio
JP9506577A 1977-08-10 1977-08-10 Carrier device for semiconductor wafer and mask Pending JPS5429978A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9506577A JPS5429978A (en) 1977-08-10 1977-08-10 Carrier device for semiconductor wafer and mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9506577A JPS5429978A (en) 1977-08-10 1977-08-10 Carrier device for semiconductor wafer and mask

Publications (1)

Publication Number Publication Date
JPS5429978A true JPS5429978A (en) 1979-03-06

Family

ID=14127597

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9506577A Pending JPS5429978A (en) 1977-08-10 1977-08-10 Carrier device for semiconductor wafer and mask

Country Status (1)

Country Link
JP (1) JPS5429978A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55121640A (en) * 1979-03-13 1980-09-18 Chiyou Lsi Gijutsu Kenkyu Kumiai Mask alignment method
JPS57183031A (en) * 1981-05-06 1982-11-11 Toshiba Corp Method for wafer exposure and device thereof

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4984790A (en) * 1972-12-22 1974-08-14

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4984790A (en) * 1972-12-22 1974-08-14

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55121640A (en) * 1979-03-13 1980-09-18 Chiyou Lsi Gijutsu Kenkyu Kumiai Mask alignment method
JPS57183031A (en) * 1981-05-06 1982-11-11 Toshiba Corp Method for wafer exposure and device thereof

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