JPS5218176A - Production method of semiconductor device - Google Patents

Production method of semiconductor device

Info

Publication number
JPS5218176A
JPS5218176A JP50093875A JP9387575A JPS5218176A JP S5218176 A JPS5218176 A JP S5218176A JP 50093875 A JP50093875 A JP 50093875A JP 9387575 A JP9387575 A JP 9387575A JP S5218176 A JPS5218176 A JP S5218176A
Authority
JP
Japan
Prior art keywords
semiconductor device
production method
mask
attaching
treated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50093875A
Other languages
Japanese (ja)
Inventor
Eiji Ozaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP50093875A priority Critical patent/JPS5218176A/en
Publication of JPS5218176A publication Critical patent/JPS5218176A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE: In order to perform the accurate position adjustment with the mask, by means of attaching a microscopic mark on the surface to be treated through using a radiation source.
COPYRIGHT: (C)1977,JPO&Japio
JP50093875A 1975-08-01 1975-08-01 Production method of semiconductor device Pending JPS5218176A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50093875A JPS5218176A (en) 1975-08-01 1975-08-01 Production method of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50093875A JPS5218176A (en) 1975-08-01 1975-08-01 Production method of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5218176A true JPS5218176A (en) 1977-02-10

Family

ID=14094631

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50093875A Pending JPS5218176A (en) 1975-08-01 1975-08-01 Production method of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5218176A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54114183A (en) * 1978-02-27 1979-09-06 Canon Inc Position matching method
JP2009022240A (en) * 2007-07-23 2009-02-05 Taito:Kk Animal protection net

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54114183A (en) * 1978-02-27 1979-09-06 Canon Inc Position matching method
JPS6148251B2 (en) * 1978-02-27 1986-10-23 Canon Kk
JP2009022240A (en) * 2007-07-23 2009-02-05 Taito:Kk Animal protection net

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