JPS53142879A - Manufacture for semiconductor device - Google Patents
Manufacture for semiconductor deviceInfo
- Publication number
- JPS53142879A JPS53142879A JP5802577A JP5802577A JPS53142879A JP S53142879 A JPS53142879 A JP S53142879A JP 5802577 A JP5802577 A JP 5802577A JP 5802577 A JP5802577 A JP 5802577A JP S53142879 A JPS53142879 A JP S53142879A
- Authority
- JP
- Japan
- Prior art keywords
- gate
- manufacture
- semiconductor device
- region
- gate length
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To obtain the gate length of less than 1μm through decreasing the gate length, by injecting ions to a semiconductor substrate forming the gate mask pattern with a given angle and by placing the region leading to the source or drain region in the gate region.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5802577A JPS53142879A (en) | 1977-05-18 | 1977-05-18 | Manufacture for semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5802577A JPS53142879A (en) | 1977-05-18 | 1977-05-18 | Manufacture for semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53142879A true JPS53142879A (en) | 1978-12-12 |
Family
ID=13072399
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5802577A Pending JPS53142879A (en) | 1977-05-18 | 1977-05-18 | Manufacture for semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53142879A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6260265A (en) * | 1985-09-10 | 1987-03-16 | Seiko Epson Corp | Manufacture of semiconductor device |
-
1977
- 1977-05-18 JP JP5802577A patent/JPS53142879A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6260265A (en) * | 1985-09-10 | 1987-03-16 | Seiko Epson Corp | Manufacture of semiconductor device |
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