JPS53142879A - Manufacture for semiconductor device - Google Patents

Manufacture for semiconductor device

Info

Publication number
JPS53142879A
JPS53142879A JP5802577A JP5802577A JPS53142879A JP S53142879 A JPS53142879 A JP S53142879A JP 5802577 A JP5802577 A JP 5802577A JP 5802577 A JP5802577 A JP 5802577A JP S53142879 A JPS53142879 A JP S53142879A
Authority
JP
Japan
Prior art keywords
gate
manufacture
semiconductor device
region
gate length
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5802577A
Other languages
Japanese (ja)
Inventor
Kazufumi Ogawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP5802577A priority Critical patent/JPS53142879A/en
Publication of JPS53142879A publication Critical patent/JPS53142879A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To obtain the gate length of less than 1μm through decreasing the gate length, by injecting ions to a semiconductor substrate forming the gate mask pattern with a given angle and by placing the region leading to the source or drain region in the gate region.
COPYRIGHT: (C)1978,JPO&Japio
JP5802577A 1977-05-18 1977-05-18 Manufacture for semiconductor device Pending JPS53142879A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5802577A JPS53142879A (en) 1977-05-18 1977-05-18 Manufacture for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5802577A JPS53142879A (en) 1977-05-18 1977-05-18 Manufacture for semiconductor device

Publications (1)

Publication Number Publication Date
JPS53142879A true JPS53142879A (en) 1978-12-12

Family

ID=13072399

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5802577A Pending JPS53142879A (en) 1977-05-18 1977-05-18 Manufacture for semiconductor device

Country Status (1)

Country Link
JP (1) JPS53142879A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6260265A (en) * 1985-09-10 1987-03-16 Seiko Epson Corp Manufacture of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6260265A (en) * 1985-09-10 1987-03-16 Seiko Epson Corp Manufacture of semiconductor device

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