JPS53138284A - Manufacture for semiconductor part - Google Patents

Manufacture for semiconductor part

Info

Publication number
JPS53138284A
JPS53138284A JP5281977A JP5281977A JPS53138284A JP S53138284 A JPS53138284 A JP S53138284A JP 5281977 A JP5281977 A JP 5281977A JP 5281977 A JP5281977 A JP 5281977A JP S53138284 A JPS53138284 A JP S53138284A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor part
window
mask material
manufacture process
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5281977A
Other languages
Japanese (ja)
Inventor
Akisuke Mori
Kuniaki Makabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP5281977A priority Critical patent/JPS53138284A/en
Publication of JPS53138284A publication Critical patent/JPS53138284A/en
Pending legal-status Critical Current

Links

Landscapes

  • Semiconductor Memories (AREA)
  • Read Only Memory (AREA)

Abstract

PURPOSE: To obtain a memory cell with small cell area through a simple manufacture process by injecting ions via the window of a mask material.
COPYRIGHT: (C)1978,JPO&Japio
JP5281977A 1977-05-09 1977-05-09 Manufacture for semiconductor part Pending JPS53138284A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5281977A JPS53138284A (en) 1977-05-09 1977-05-09 Manufacture for semiconductor part

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5281977A JPS53138284A (en) 1977-05-09 1977-05-09 Manufacture for semiconductor part

Publications (1)

Publication Number Publication Date
JPS53138284A true JPS53138284A (en) 1978-12-02

Family

ID=12925440

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5281977A Pending JPS53138284A (en) 1977-05-09 1977-05-09 Manufacture for semiconductor part

Country Status (1)

Country Link
JP (1) JPS53138284A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5992562A (en) * 1982-11-18 1984-05-28 Matsushita Electric Ind Co Ltd Formation of buried channel
JPS63147316A (en) * 1986-12-11 1988-06-20 Nec Ic Microcomput Syst Ltd Integrated circuit device
JPH04239173A (en) * 1991-01-14 1992-08-27 Sharp Corp Manufacture of solid-state image sensing device
US5491105A (en) * 1992-03-25 1996-02-13 Texas Instruments Incorporated LDMOS transistor with self-aligned source/backgate and photo-aligned gate

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5992562A (en) * 1982-11-18 1984-05-28 Matsushita Electric Ind Co Ltd Formation of buried channel
JPS63147316A (en) * 1986-12-11 1988-06-20 Nec Ic Microcomput Syst Ltd Integrated circuit device
JPH04239173A (en) * 1991-01-14 1992-08-27 Sharp Corp Manufacture of solid-state image sensing device
US5491105A (en) * 1992-03-25 1996-02-13 Texas Instruments Incorporated LDMOS transistor with self-aligned source/backgate and photo-aligned gate

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