JPS5225582A - Production method of semiconductor device - Google Patents
Production method of semiconductor deviceInfo
- Publication number
- JPS5225582A JPS5225582A JP10117075A JP10117075A JPS5225582A JP S5225582 A JPS5225582 A JP S5225582A JP 10117075 A JP10117075 A JP 10117075A JP 10117075 A JP10117075 A JP 10117075A JP S5225582 A JPS5225582 A JP S5225582A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- production method
- source
- metal
- gate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To reduce the gate capacity of a semiconductor device by reducing the overlapping of the source metal and the source and drain diffusion layer, by means of etching the gate metal for two times.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10117075A JPS5225582A (en) | 1975-08-22 | 1975-08-22 | Production method of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10117075A JPS5225582A (en) | 1975-08-22 | 1975-08-22 | Production method of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5225582A true JPS5225582A (en) | 1977-02-25 |
Family
ID=14293536
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10117075A Pending JPS5225582A (en) | 1975-08-22 | 1975-08-22 | Production method of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5225582A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52138400A (en) * | 1976-05-13 | 1977-11-18 | Hitachi Plant Eng & Constr Co Ltd | Device for confirming water pressure of sprinkler head |
JPS546778A (en) * | 1977-06-17 | 1979-01-19 | Sharp Corp | Manufacture of mos field effect transistor |
JPS5594659A (en) * | 1979-01-09 | 1980-07-18 | Robatel Slpi | Centrifugal machine |
US5115290A (en) * | 1989-09-06 | 1992-05-19 | Kabushiki Kaisha Toshiba | Mos type semiconductor device and method for manufacturing the same |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4917073A (en) * | 1972-06-09 | 1974-02-15 |
-
1975
- 1975-08-22 JP JP10117075A patent/JPS5225582A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4917073A (en) * | 1972-06-09 | 1974-02-15 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52138400A (en) * | 1976-05-13 | 1977-11-18 | Hitachi Plant Eng & Constr Co Ltd | Device for confirming water pressure of sprinkler head |
JPS5525864B2 (en) * | 1976-05-13 | 1980-07-09 | ||
JPS546778A (en) * | 1977-06-17 | 1979-01-19 | Sharp Corp | Manufacture of mos field effect transistor |
JPS5594659A (en) * | 1979-01-09 | 1980-07-18 | Robatel Slpi | Centrifugal machine |
US5115290A (en) * | 1989-09-06 | 1992-05-19 | Kabushiki Kaisha Toshiba | Mos type semiconductor device and method for manufacturing the same |
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