JPS5272581A - Production of semiconductor element - Google Patents

Production of semiconductor element

Info

Publication number
JPS5272581A
JPS5272581A JP14898675A JP14898675A JPS5272581A JP S5272581 A JPS5272581 A JP S5272581A JP 14898675 A JP14898675 A JP 14898675A JP 14898675 A JP14898675 A JP 14898675A JP S5272581 A JPS5272581 A JP S5272581A
Authority
JP
Japan
Prior art keywords
production
semiconductor element
fet
drain
openings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14898675A
Other languages
Japanese (ja)
Other versions
JPS5912019B2 (en
Inventor
Makoto Nakase
Toshiaki Shinozaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP14898675A priority Critical patent/JPS5912019B2/en
Publication of JPS5272581A publication Critical patent/JPS5272581A/en
Publication of JPS5912019B2 publication Critical patent/JPS5912019B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To obtain a semiconductor device provided with an oxide film layer having openings for formation of source, drain and gate regions in an FET and a guard ring by using a photoetching process only once.
COPYRIGHT: (C)1977,JPO&Japio
JP14898675A 1975-12-13 1975-12-13 Handout Taisoshino Seizouhouhou Expired JPS5912019B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14898675A JPS5912019B2 (en) 1975-12-13 1975-12-13 Handout Taisoshino Seizouhouhou

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14898675A JPS5912019B2 (en) 1975-12-13 1975-12-13 Handout Taisoshino Seizouhouhou

Publications (2)

Publication Number Publication Date
JPS5272581A true JPS5272581A (en) 1977-06-17
JPS5912019B2 JPS5912019B2 (en) 1984-03-19

Family

ID=15465128

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14898675A Expired JPS5912019B2 (en) 1975-12-13 1975-12-13 Handout Taisoshino Seizouhouhou

Country Status (1)

Country Link
JP (1) JPS5912019B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61225616A (en) * 1985-03-29 1986-10-07 Shin Meiwa Ind Co Ltd Water level display controller for liquid spray truck

Also Published As

Publication number Publication date
JPS5912019B2 (en) 1984-03-19

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