JPS5272581A - Production of semiconductor element - Google Patents
Production of semiconductor elementInfo
- Publication number
- JPS5272581A JPS5272581A JP14898675A JP14898675A JPS5272581A JP S5272581 A JPS5272581 A JP S5272581A JP 14898675 A JP14898675 A JP 14898675A JP 14898675 A JP14898675 A JP 14898675A JP S5272581 A JPS5272581 A JP S5272581A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor element
- fet
- drain
- openings
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To obtain a semiconductor device provided with an oxide film layer having openings for formation of source, drain and gate regions in an FET and a guard ring by using a photoetching process only once.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14898675A JPS5912019B2 (en) | 1975-12-13 | 1975-12-13 | Handout Taisoshino Seizouhouhou |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14898675A JPS5912019B2 (en) | 1975-12-13 | 1975-12-13 | Handout Taisoshino Seizouhouhou |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5272581A true JPS5272581A (en) | 1977-06-17 |
JPS5912019B2 JPS5912019B2 (en) | 1984-03-19 |
Family
ID=15465128
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14898675A Expired JPS5912019B2 (en) | 1975-12-13 | 1975-12-13 | Handout Taisoshino Seizouhouhou |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5912019B2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61225616A (en) * | 1985-03-29 | 1986-10-07 | Shin Meiwa Ind Co Ltd | Water level display controller for liquid spray truck |
-
1975
- 1975-12-13 JP JP14898675A patent/JPS5912019B2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5912019B2 (en) | 1984-03-19 |
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