JPS5416984A - Wafer locating device - Google Patents

Wafer locating device

Info

Publication number
JPS5416984A
JPS5416984A JP8098877A JP8098877A JPS5416984A JP S5416984 A JPS5416984 A JP S5416984A JP 8098877 A JP8098877 A JP 8098877A JP 8098877 A JP8098877 A JP 8098877A JP S5416984 A JPS5416984 A JP S5416984A
Authority
JP
Japan
Prior art keywords
wafer
locating device
locating
wafer locating
actomation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8098877A
Other languages
Japanese (ja)
Inventor
Susumu Aiuchi
Mineo Nomoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8098877A priority Critical patent/JPS5416984A/en
Publication of JPS5416984A publication Critical patent/JPS5416984A/en
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/18—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine for positioning only

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)

Abstract

PURPOSE:To improve the locating accuracy of pattern of wafer and achieve the actomation and improved performance of semiconductor production process, by performing locating of the wafer by the use of cruciform marks for performing locating of photo mask and wafer.
JP8098877A 1977-07-08 1977-07-08 Wafer locating device Pending JPS5416984A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8098877A JPS5416984A (en) 1977-07-08 1977-07-08 Wafer locating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8098877A JPS5416984A (en) 1977-07-08 1977-07-08 Wafer locating device

Publications (1)

Publication Number Publication Date
JPS5416984A true JPS5416984A (en) 1979-02-07

Family

ID=13733870

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8098877A Pending JPS5416984A (en) 1977-07-08 1977-07-08 Wafer locating device

Country Status (1)

Country Link
JP (1) JPS5416984A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6372138A (en) * 1986-09-12 1988-04-01 Metsukusu:Kk Device for positioning silicon wafer
US4738073A (en) * 1985-10-23 1988-04-19 G. D. Societa Per Azioni Device for forming and controlling the outer wrapping of packs in a cigarette packaging machine
US4845373A (en) * 1984-02-22 1989-07-04 Kla Instruments Corporation Automatic alignment apparatus having low and high resolution optics for coarse and fine adjusting
JPH03102847A (en) * 1989-09-16 1991-04-30 Hitachi Ltd Method and device for detecting orientation flat and reduced projection exposure device
US5365672A (en) * 1993-01-26 1994-11-22 Mecs Corporation Positioning apparatus for a semiconductor wafer

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4845373A (en) * 1984-02-22 1989-07-04 Kla Instruments Corporation Automatic alignment apparatus having low and high resolution optics for coarse and fine adjusting
US4738073A (en) * 1985-10-23 1988-04-19 G. D. Societa Per Azioni Device for forming and controlling the outer wrapping of packs in a cigarette packaging machine
JPS6372138A (en) * 1986-09-12 1988-04-01 Metsukusu:Kk Device for positioning silicon wafer
JPH0225254B2 (en) * 1986-09-12 1990-06-01 Metsukusu Kk
JPH03102847A (en) * 1989-09-16 1991-04-30 Hitachi Ltd Method and device for detecting orientation flat and reduced projection exposure device
US5365672A (en) * 1993-01-26 1994-11-22 Mecs Corporation Positioning apparatus for a semiconductor wafer

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