JPS53123089A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS53123089A
JPS53123089A JP3617977A JP3617977A JPS53123089A JP S53123089 A JPS53123089 A JP S53123089A JP 3617977 A JP3617977 A JP 3617977A JP 3617977 A JP3617977 A JP 3617977A JP S53123089 A JPS53123089 A JP S53123089A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
strip
index
accuracy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3617977A
Other languages
Japanese (ja)
Other versions
JPS5947480B2 (en
Inventor
Shigeo Yamashita
Kunio Aiki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP52036179A priority Critical patent/JPS5947480B2/en
Publication of JPS53123089A publication Critical patent/JPS53123089A/en
Publication of JPS5947480B2 publication Critical patent/JPS5947480B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To improve the accuracy of forming laser elements by selecting a chemical etching solution, selectively etching only the intended specific crystal growth layer to expose part of strip-form grooves having been formed on substrate and using this as an index for mask alignment in photoetching process.
COPYRIGHT: (C)1978,JPO&Japio
JP52036179A 1977-04-01 1977-04-01 Manufacturing method of semiconductor device Expired JPS5947480B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP52036179A JPS5947480B2 (en) 1977-04-01 1977-04-01 Manufacturing method of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52036179A JPS5947480B2 (en) 1977-04-01 1977-04-01 Manufacturing method of semiconductor device

Publications (2)

Publication Number Publication Date
JPS53123089A true JPS53123089A (en) 1978-10-27
JPS5947480B2 JPS5947480B2 (en) 1984-11-19

Family

ID=12462501

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52036179A Expired JPS5947480B2 (en) 1977-04-01 1977-04-01 Manufacturing method of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5947480B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5643723A (en) * 1979-09-18 1981-04-22 Nec Corp Manufacture of semiconductor element
CN102833999A (en) * 2010-04-12 2012-12-19 伽玛卡兹股份有限公司 Fishhook and method for manufacturing same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5643723A (en) * 1979-09-18 1981-04-22 Nec Corp Manufacture of semiconductor element
CN102833999A (en) * 2010-04-12 2012-12-19 伽玛卡兹股份有限公司 Fishhook and method for manufacturing same

Also Published As

Publication number Publication date
JPS5947480B2 (en) 1984-11-19

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