JPS53123089A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS53123089A JPS53123089A JP3617977A JP3617977A JPS53123089A JP S53123089 A JPS53123089 A JP S53123089A JP 3617977 A JP3617977 A JP 3617977A JP 3617977 A JP3617977 A JP 3617977A JP S53123089 A JPS53123089 A JP S53123089A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- strip
- index
- accuracy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To improve the accuracy of forming laser elements by selecting a chemical etching solution, selectively etching only the intended specific crystal growth layer to expose part of strip-form grooves having been formed on substrate and using this as an index for mask alignment in photoetching process.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52036179A JPS5947480B2 (en) | 1977-04-01 | 1977-04-01 | Manufacturing method of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52036179A JPS5947480B2 (en) | 1977-04-01 | 1977-04-01 | Manufacturing method of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53123089A true JPS53123089A (en) | 1978-10-27 |
JPS5947480B2 JPS5947480B2 (en) | 1984-11-19 |
Family
ID=12462501
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP52036179A Expired JPS5947480B2 (en) | 1977-04-01 | 1977-04-01 | Manufacturing method of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5947480B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5643723A (en) * | 1979-09-18 | 1981-04-22 | Nec Corp | Manufacture of semiconductor element |
CN102833999A (en) * | 2010-04-12 | 2012-12-19 | 伽玛卡兹股份有限公司 | Fishhook and method for manufacturing same |
-
1977
- 1977-04-01 JP JP52036179A patent/JPS5947480B2/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5643723A (en) * | 1979-09-18 | 1981-04-22 | Nec Corp | Manufacture of semiconductor element |
CN102833999A (en) * | 2010-04-12 | 2012-12-19 | 伽玛卡兹股份有限公司 | Fishhook and method for manufacturing same |
Also Published As
Publication number | Publication date |
---|---|
JPS5947480B2 (en) | 1984-11-19 |
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