JPS5397776A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5397776A
JPS5397776A JP1275677A JP1275677A JPS5397776A JP S5397776 A JPS5397776 A JP S5397776A JP 1275677 A JP1275677 A JP 1275677A JP 1275677 A JP1275677 A JP 1275677A JP S5397776 A JPS5397776 A JP S5397776A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
etch
high concentration
impurity regions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1275677A
Other languages
Japanese (ja)
Inventor
Tsunehiro Taguchi
Yoji Yamanaka
Toshio Wada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP1275677A priority Critical patent/JPS5397776A/en
Publication of JPS5397776A publication Critical patent/JPS5397776A/en
Pending legal-status Critical Current

Links

Landscapes

  • Weting (AREA)

Abstract

PURPOSE: To etch Si3 O4 film highly accurately by forming impurity regions at a high concentration selectively in Si3 N4.
COPYRIGHT: (C)1978,JPO&Japio
JP1275677A 1977-02-07 1977-02-07 Production of semiconductor device Pending JPS5397776A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1275677A JPS5397776A (en) 1977-02-07 1977-02-07 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1275677A JPS5397776A (en) 1977-02-07 1977-02-07 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5397776A true JPS5397776A (en) 1978-08-26

Family

ID=11814241

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1275677A Pending JPS5397776A (en) 1977-02-07 1977-02-07 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5397776A (en)

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