JPS545386A - Surface processor for wafer - Google Patents
Surface processor for waferInfo
- Publication number
- JPS545386A JPS545386A JP6983277A JP6983277A JPS545386A JP S545386 A JPS545386 A JP S545386A JP 6983277 A JP6983277 A JP 6983277A JP 6983277 A JP6983277 A JP 6983277A JP S545386 A JPS545386 A JP S545386A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- surface processor
- substrate
- processor
- supplying
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Abstract
PURPOSE: To ensure a high-uniformity surface processing by holding the substrate almost on the same plane and then supplying the reaction gas from both surfaces of the substrate.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6983277A JPS545386A (en) | 1977-06-15 | 1977-06-15 | Surface processor for wafer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6983277A JPS545386A (en) | 1977-06-15 | 1977-06-15 | Surface processor for wafer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS545386A true JPS545386A (en) | 1979-01-16 |
Family
ID=13414136
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6983277A Pending JPS545386A (en) | 1977-06-15 | 1977-06-15 | Surface processor for wafer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS545386A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59122719A (en) * | 1982-12-28 | 1984-07-16 | Nagatoshi Suzuki | Remover for exhaust gas from engine |
JPS61168923A (en) * | 1985-01-17 | 1986-07-30 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | Even gas flow generator |
-
1977
- 1977-06-15 JP JP6983277A patent/JPS545386A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59122719A (en) * | 1982-12-28 | 1984-07-16 | Nagatoshi Suzuki | Remover for exhaust gas from engine |
JPS61168923A (en) * | 1985-01-17 | 1986-07-30 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | Even gas flow generator |
JPH0439223B2 (en) * | 1985-01-17 | 1992-06-26 |
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