JPS5429979A - Carrier device for semiconductor wafer and mask - Google Patents

Carrier device for semiconductor wafer and mask

Info

Publication number
JPS5429979A
JPS5429979A JP9506777A JP9506777A JPS5429979A JP S5429979 A JPS5429979 A JP S5429979A JP 9506777 A JP9506777 A JP 9506777A JP 9506777 A JP9506777 A JP 9506777A JP S5429979 A JPS5429979 A JP S5429979A
Authority
JP
Japan
Prior art keywords
mask
semiconductor wafer
carrier device
parts
microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9506777A
Other languages
Japanese (ja)
Inventor
Ryuichi Funatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9506777A priority Critical patent/JPS5429979A/en
Publication of JPS5429979A publication Critical patent/JPS5429979A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To supply and extract a substrate and mask without lifting a microscope or mask, by only three constituting parts which are easily operated, has a few movable parts, and move linearly.
COPYRIGHT: (C)1979,JPO&Japio
JP9506777A 1977-08-10 1977-08-10 Carrier device for semiconductor wafer and mask Pending JPS5429979A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9506777A JPS5429979A (en) 1977-08-10 1977-08-10 Carrier device for semiconductor wafer and mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9506777A JPS5429979A (en) 1977-08-10 1977-08-10 Carrier device for semiconductor wafer and mask

Publications (1)

Publication Number Publication Date
JPS5429979A true JPS5429979A (en) 1979-03-06

Family

ID=14127648

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9506777A Pending JPS5429979A (en) 1977-08-10 1977-08-10 Carrier device for semiconductor wafer and mask

Country Status (1)

Country Link
JP (1) JPS5429979A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005505147A (en) * 2001-10-09 2005-02-17 ウルトラテック インク Method and apparatus for mechanically masking a workpiece

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005505147A (en) * 2001-10-09 2005-02-17 ウルトラテック インク Method and apparatus for mechanically masking a workpiece

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