JPS5429979A - Carrier device for semiconductor wafer and mask - Google Patents
Carrier device for semiconductor wafer and maskInfo
- Publication number
- JPS5429979A JPS5429979A JP9506777A JP9506777A JPS5429979A JP S5429979 A JPS5429979 A JP S5429979A JP 9506777 A JP9506777 A JP 9506777A JP 9506777 A JP9506777 A JP 9506777A JP S5429979 A JPS5429979 A JP S5429979A
- Authority
- JP
- Japan
- Prior art keywords
- mask
- semiconductor wafer
- carrier device
- parts
- microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To supply and extract a substrate and mask without lifting a microscope or mask, by only three constituting parts which are easily operated, has a few movable parts, and move linearly.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9506777A JPS5429979A (en) | 1977-08-10 | 1977-08-10 | Carrier device for semiconductor wafer and mask |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9506777A JPS5429979A (en) | 1977-08-10 | 1977-08-10 | Carrier device for semiconductor wafer and mask |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5429979A true JPS5429979A (en) | 1979-03-06 |
Family
ID=14127648
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9506777A Pending JPS5429979A (en) | 1977-08-10 | 1977-08-10 | Carrier device for semiconductor wafer and mask |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5429979A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005505147A (en) * | 2001-10-09 | 2005-02-17 | ウルトラテック インク | Method and apparatus for mechanically masking a workpiece |
-
1977
- 1977-08-10 JP JP9506777A patent/JPS5429979A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005505147A (en) * | 2001-10-09 | 2005-02-17 | ウルトラテック インク | Method and apparatus for mechanically masking a workpiece |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS51147179A (en) | Method of munufacturing of semiconductor device | |
JPS5255379A (en) | Semiconductor device | |
JPS5429979A (en) | Carrier device for semiconductor wafer and mask | |
JPS5318967A (en) | Wafer sucking jig | |
JPS54984A (en) | Containing tool for semiconductor wafer | |
JPS5441665A (en) | Manufacture for semiconductor device | |
JPS5429978A (en) | Carrier device for semiconductor wafer and mask | |
JPS51118968A (en) | Electron beam exposure device | |
JPS53123083A (en) | Production of semiconductor device | |
JPS5242365A (en) | Tool for semiconductors | |
JPS5437468A (en) | Breaking device for semiconductor wafer | |
JPS5413272A (en) | Measuring unit for semiconductor | |
JPS535573A (en) | Photo mask for semiconductor device | |
JPS5384684A (en) | Plasma etching device | |
JPS5424574A (en) | Manufacture for semiconductor device | |
JPS5382173A (en) | Positioning method | |
JPS53121468A (en) | Manufacture for semiconductor device | |
JPS51135465A (en) | Semi-conductor unit | |
JPS548971A (en) | Manufacture of semiconductor device | |
JPS5372567A (en) | Semiconductor device | |
JPS53135568A (en) | Manufacture for semiconductor device | |
JPS5248976A (en) | Process for production of semiconductor device | |
JPS5286087A (en) | Manufacture of semiconductor device | |
JPS5364476A (en) | Slide lever for semiconductor wafer transfer device | |
JPS5427372A (en) | Manufacture of semiconductor device |