JPS54984A - Containing tool for semiconductor wafer - Google Patents

Containing tool for semiconductor wafer

Info

Publication number
JPS54984A
JPS54984A JP6715477A JP6715477A JPS54984A JP S54984 A JPS54984 A JP S54984A JP 6715477 A JP6715477 A JP 6715477A JP 6715477 A JP6715477 A JP 6715477A JP S54984 A JPS54984 A JP S54984A
Authority
JP
Japan
Prior art keywords
semiconductor wafer
containing tool
rod
wafers
tool
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6715477A
Other languages
Japanese (ja)
Inventor
Sokichi Yamagishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP6715477A priority Critical patent/JPS54984A/en
Publication of JPS54984A publication Critical patent/JPS54984A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To arrange the orientation flatness of wafers on the rod, by providing a groove at the side plates opposing of a tool containing a plural number of semiconductor wafers, inserting a rod to it, and turning the wafers located on it while turming the rod.
COPYRIGHT: (C)1979,JPO&Japio
JP6715477A 1977-06-06 1977-06-06 Containing tool for semiconductor wafer Pending JPS54984A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6715477A JPS54984A (en) 1977-06-06 1977-06-06 Containing tool for semiconductor wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6715477A JPS54984A (en) 1977-06-06 1977-06-06 Containing tool for semiconductor wafer

Publications (1)

Publication Number Publication Date
JPS54984A true JPS54984A (en) 1979-01-06

Family

ID=13336692

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6715477A Pending JPS54984A (en) 1977-06-06 1977-06-06 Containing tool for semiconductor wafer

Country Status (1)

Country Link
JP (1) JPS54984A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56164548U (en) * 1980-05-08 1981-12-07
JPS5923737U (en) * 1982-08-05 1984-02-14 三菱電機株式会社 cassette
JPS60111049U (en) * 1983-12-29 1985-07-27 甲斐　敬 Wafer aligner
JPS61154140A (en) * 1984-12-27 1986-07-12 Mitsubishi Electric Corp Wafer lot reader
JPH03129750A (en) * 1987-10-12 1991-06-03 Tokyo Erekutoron Yamanashi Kk Chuck for transferring wafer-carrier

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56164548U (en) * 1980-05-08 1981-12-07
JPS5923737U (en) * 1982-08-05 1984-02-14 三菱電機株式会社 cassette
JPS60111049U (en) * 1983-12-29 1985-07-27 甲斐　敬 Wafer aligner
JPS61154140A (en) * 1984-12-27 1986-07-12 Mitsubishi Electric Corp Wafer lot reader
JPH0234176B2 (en) * 1984-12-27 1990-08-01 Mitsubishi Electric Corp
JPH03129750A (en) * 1987-10-12 1991-06-03 Tokyo Erekutoron Yamanashi Kk Chuck for transferring wafer-carrier

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