JPS52131473A - Wafer holding tool - Google Patents

Wafer holding tool

Info

Publication number
JPS52131473A
JPS52131473A JP4765776A JP4765776A JPS52131473A JP S52131473 A JPS52131473 A JP S52131473A JP 4765776 A JP4765776 A JP 4765776A JP 4765776 A JP4765776 A JP 4765776A JP S52131473 A JPS52131473 A JP S52131473A
Authority
JP
Japan
Prior art keywords
wafer holding
holding tool
wafer
catches
holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4765776A
Other languages
Japanese (ja)
Other versions
JPS5856976B2 (en
Inventor
Isao Asano
Kazuo Uchida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4765776A priority Critical patent/JPS5856976B2/en
Publication of JPS52131473A publication Critical patent/JPS52131473A/en
Publication of JPS5856976B2 publication Critical patent/JPS5856976B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To secure holding of the wafer regardless of the size of the wafer by providing more than three movable holding catches to the wafer holding plate and by attaching a coil spring to at least one of three catches.
COPYRIGHT: (C)1977,JPO&Japio
JP4765776A 1976-04-28 1976-04-28 Wafer holding jig Expired JPS5856976B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4765776A JPS5856976B2 (en) 1976-04-28 1976-04-28 Wafer holding jig

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4765776A JPS5856976B2 (en) 1976-04-28 1976-04-28 Wafer holding jig

Publications (2)

Publication Number Publication Date
JPS52131473A true JPS52131473A (en) 1977-11-04
JPS5856976B2 JPS5856976B2 (en) 1983-12-17

Family

ID=12781318

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4765776A Expired JPS5856976B2 (en) 1976-04-28 1976-04-28 Wafer holding jig

Country Status (1)

Country Link
JP (1) JPS5856976B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5769737A (en) * 1980-10-17 1982-04-28 Hitachi Ltd Coating method and device for resist on both side surfaces of wafer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5769737A (en) * 1980-10-17 1982-04-28 Hitachi Ltd Coating method and device for resist on both side surfaces of wafer
JPS6226579B2 (en) * 1980-10-17 1987-06-09 Hitachi Ltd

Also Published As

Publication number Publication date
JPS5856976B2 (en) 1983-12-17

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