JPS52131473A - Wafer holding tool - Google Patents
Wafer holding toolInfo
- Publication number
- JPS52131473A JPS52131473A JP4765776A JP4765776A JPS52131473A JP S52131473 A JPS52131473 A JP S52131473A JP 4765776 A JP4765776 A JP 4765776A JP 4765776 A JP4765776 A JP 4765776A JP S52131473 A JPS52131473 A JP S52131473A
- Authority
- JP
- Japan
- Prior art keywords
- wafer holding
- holding tool
- wafer
- catches
- holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To secure holding of the wafer regardless of the size of the wafer by providing more than three movable holding catches to the wafer holding plate and by attaching a coil spring to at least one of three catches.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4765776A JPS5856976B2 (en) | 1976-04-28 | 1976-04-28 | Wafer holding jig |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4765776A JPS5856976B2 (en) | 1976-04-28 | 1976-04-28 | Wafer holding jig |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52131473A true JPS52131473A (en) | 1977-11-04 |
JPS5856976B2 JPS5856976B2 (en) | 1983-12-17 |
Family
ID=12781318
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4765776A Expired JPS5856976B2 (en) | 1976-04-28 | 1976-04-28 | Wafer holding jig |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5856976B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5769737A (en) * | 1980-10-17 | 1982-04-28 | Hitachi Ltd | Coating method and device for resist on both side surfaces of wafer |
-
1976
- 1976-04-28 JP JP4765776A patent/JPS5856976B2/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5769737A (en) * | 1980-10-17 | 1982-04-28 | Hitachi Ltd | Coating method and device for resist on both side surfaces of wafer |
JPS6226579B2 (en) * | 1980-10-17 | 1987-06-09 | Hitachi Ltd |
Also Published As
Publication number | Publication date |
---|---|
JPS5856976B2 (en) | 1983-12-17 |
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