JPS5211782A - Method of manufacturing semiconductor device - Google Patents

Method of manufacturing semiconductor device

Info

Publication number
JPS5211782A
JPS5211782A JP8723775A JP8723775A JPS5211782A JP S5211782 A JPS5211782 A JP S5211782A JP 8723775 A JP8723775 A JP 8723775A JP 8723775 A JP8723775 A JP 8723775A JP S5211782 A JPS5211782 A JP S5211782A
Authority
JP
Japan
Prior art keywords
semiconductor device
manufacturing semiconductor
warping
substrates
prevent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8723775A
Other languages
Japanese (ja)
Inventor
Sadao Matsumura
Toshiharu Ito
Katsuyoshi Fukuda
Shoichi Washitsuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP8723775A priority Critical patent/JPS5211782A/en
Publication of JPS5211782A publication Critical patent/JPS5211782A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To prevent the warping of substrates by forming polycrystal Si at 1080°C W1120°C.
COPYRIGHT: (C)1977,JPO&Japio
JP8723775A 1975-07-18 1975-07-18 Method of manufacturing semiconductor device Pending JPS5211782A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8723775A JPS5211782A (en) 1975-07-18 1975-07-18 Method of manufacturing semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8723775A JPS5211782A (en) 1975-07-18 1975-07-18 Method of manufacturing semiconductor device

Publications (1)

Publication Number Publication Date
JPS5211782A true JPS5211782A (en) 1977-01-28

Family

ID=13909211

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8723775A Pending JPS5211782A (en) 1975-07-18 1975-07-18 Method of manufacturing semiconductor device

Country Status (1)

Country Link
JP (1) JPS5211782A (en)

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