JPS546471A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS546471A
JPS546471A JP7188577A JP7188577A JPS546471A JP S546471 A JPS546471 A JP S546471A JP 7188577 A JP7188577 A JP 7188577A JP 7188577 A JP7188577 A JP 7188577A JP S546471 A JPS546471 A JP S546471A
Authority
JP
Japan
Prior art keywords
film
manufacture
semiconductor device
type
sio
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7188577A
Other languages
Japanese (ja)
Inventor
Fujiki Tokuyoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP7188577A priority Critical patent/JPS546471A/en
Publication of JPS546471A publication Critical patent/JPS546471A/en
Pending legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE: To enable a semiconductor to operate at a high speed with a shallow junction obtained by adhering a SiO2 film and Si3N4 film on the semiconductor substrate, by etching the SiO2 film while generating a barrier at the Si3N4 film, and by using these as a mask for forming a P-type and P+-type base regions and N+-type emitter region.
COPYRIGHT: (C)1979,JPO&Japio
JP7188577A 1977-06-16 1977-06-16 Manufacture of semiconductor device Pending JPS546471A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7188577A JPS546471A (en) 1977-06-16 1977-06-16 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7188577A JPS546471A (en) 1977-06-16 1977-06-16 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS546471A true JPS546471A (en) 1979-01-18

Family

ID=13473422

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7188577A Pending JPS546471A (en) 1977-06-16 1977-06-16 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS546471A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60257570A (en) * 1984-06-04 1985-12-19 Rohm Co Ltd Manufacture of semiconductor device
JPS61135160A (en) * 1984-12-05 1986-06-23 Mitsubishi Electric Corp Manufacture of transistor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60257570A (en) * 1984-06-04 1985-12-19 Rohm Co Ltd Manufacture of semiconductor device
JPH0462454B2 (en) * 1984-06-04 1992-10-06 Rohm Kk
JPS61135160A (en) * 1984-12-05 1986-06-23 Mitsubishi Electric Corp Manufacture of transistor

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