JPS5339093A - Production of silicon gate complementary type mis semiconductor device - Google Patents

Production of silicon gate complementary type mis semiconductor device

Info

Publication number
JPS5339093A
JPS5339093A JP11312076A JP11312076A JPS5339093A JP S5339093 A JPS5339093 A JP S5339093A JP 11312076 A JP11312076 A JP 11312076A JP 11312076 A JP11312076 A JP 11312076A JP S5339093 A JPS5339093 A JP S5339093A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
silicon gate
type mis
complementary type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11312076A
Other languages
Japanese (ja)
Inventor
Norio Anzai
Satoshi Meguro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11312076A priority Critical patent/JPS5339093A/en
Publication of JPS5339093A publication Critical patent/JPS5339093A/en
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: To reduce overhangs of the polycrystalline Si film on a field SiO2 film and avert disconnection by using a light SiO2 film as a mask for diffusing N+ type regions, and leaving this without etching.
COPYRIGHT: (C)1978,JPO&Japio
JP11312076A 1976-09-22 1976-09-22 Production of silicon gate complementary type mis semiconductor device Pending JPS5339093A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11312076A JPS5339093A (en) 1976-09-22 1976-09-22 Production of silicon gate complementary type mis semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11312076A JPS5339093A (en) 1976-09-22 1976-09-22 Production of silicon gate complementary type mis semiconductor device

Publications (1)

Publication Number Publication Date
JPS5339093A true JPS5339093A (en) 1978-04-10

Family

ID=14604015

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11312076A Pending JPS5339093A (en) 1976-09-22 1976-09-22 Production of silicon gate complementary type mis semiconductor device

Country Status (1)

Country Link
JP (1) JPS5339093A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5617477A (en) * 1979-07-23 1981-02-19 Nec Corp Pattern digitizing unit
JPS5672576A (en) * 1979-11-19 1981-06-16 Ricoh Co Ltd Picture contracting method
JPS6473660A (en) * 1987-09-14 1989-03-17 Ricoh Kk Semiconductor device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5617477A (en) * 1979-07-23 1981-02-19 Nec Corp Pattern digitizing unit
JPS6252350B2 (en) * 1979-07-23 1987-11-05 Nippon Electric Co
JPS5672576A (en) * 1979-11-19 1981-06-16 Ricoh Co Ltd Picture contracting method
JPS6473660A (en) * 1987-09-14 1989-03-17 Ricoh Kk Semiconductor device

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