JPS5228881A - Silicon gated, field effect semiconductor device - Google Patents

Silicon gated, field effect semiconductor device

Info

Publication number
JPS5228881A
JPS5228881A JP10471175A JP10471175A JPS5228881A JP S5228881 A JPS5228881 A JP S5228881A JP 10471175 A JP10471175 A JP 10471175A JP 10471175 A JP10471175 A JP 10471175A JP S5228881 A JPS5228881 A JP S5228881A
Authority
JP
Japan
Prior art keywords
field effect
semiconductor device
effect semiconductor
gated
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10471175A
Other languages
Japanese (ja)
Inventor
Motohiro Kitajima
Yoshihiko Nakagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KIYOUDOU TOUKOU KK
KYODO TOKO KK
KYODO TOUKOU KK
TOUKOU KK
Toko Inc
Original Assignee
KIYOUDOU TOUKOU KK
KYODO TOKO KK
KYODO TOUKOU KK
TOUKOU KK
Toko Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KIYOUDOU TOUKOU KK, KYODO TOKO KK, KYODO TOUKOU KK, TOUKOU KK, Toko Inc filed Critical KIYOUDOU TOUKOU KK
Priority to JP10471175A priority Critical patent/JPS5228881A/en
Publication of JPS5228881A publication Critical patent/JPS5228881A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To improve quality of Si gated, field effect semiconductor by forming polycrystalline Si film on the oxide film for gate under the condition that the former does not extend over the latter.
COPYRIGHT: (C)1977,JPO&Japio
JP10471175A 1975-08-29 1975-08-29 Silicon gated, field effect semiconductor device Pending JPS5228881A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10471175A JPS5228881A (en) 1975-08-29 1975-08-29 Silicon gated, field effect semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10471175A JPS5228881A (en) 1975-08-29 1975-08-29 Silicon gated, field effect semiconductor device

Publications (1)

Publication Number Publication Date
JPS5228881A true JPS5228881A (en) 1977-03-04

Family

ID=14388052

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10471175A Pending JPS5228881A (en) 1975-08-29 1975-08-29 Silicon gated, field effect semiconductor device

Country Status (1)

Country Link
JP (1) JPS5228881A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63269564A (en) * 1987-04-27 1988-11-07 Nec Corp Semiconductor integrated circuit device and manufacture thereof

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4917073A (en) * 1972-06-09 1974-02-15
JPS4953776A (en) * 1972-09-27 1974-05-24
JPS4955277A (en) * 1972-09-07 1974-05-29

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4917073A (en) * 1972-06-09 1974-02-15
JPS4955277A (en) * 1972-09-07 1974-05-29
JPS4953776A (en) * 1972-09-27 1974-05-24

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63269564A (en) * 1987-04-27 1988-11-07 Nec Corp Semiconductor integrated circuit device and manufacture thereof

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