JPS525279A - Semi-conductor production - Google Patents
Semi-conductor productionInfo
- Publication number
- JPS525279A JPS525279A JP8087575A JP8087575A JPS525279A JP S525279 A JPS525279 A JP S525279A JP 8087575 A JP8087575 A JP 8087575A JP 8087575 A JP8087575 A JP 8087575A JP S525279 A JPS525279 A JP S525279A
- Authority
- JP
- Japan
- Prior art keywords
- semi
- conductor production
- conductor
- production
- gate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: Sheet resistance reduction of poly-crystal Si gate for silicon gate MOSFET.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8087575A JPS5947473B2 (en) | 1975-07-02 | 1975-07-02 | Manufacturing method of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8087575A JPS5947473B2 (en) | 1975-07-02 | 1975-07-02 | Manufacturing method of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS525279A true JPS525279A (en) | 1977-01-14 |
JPS5947473B2 JPS5947473B2 (en) | 1984-11-19 |
Family
ID=13730509
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8087575A Expired JPS5947473B2 (en) | 1975-07-02 | 1975-07-02 | Manufacturing method of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5947473B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53110383A (en) * | 1977-03-08 | 1978-09-27 | Matsushita Electric Ind Co Ltd | Manufacture of semiconductor device |
-
1975
- 1975-07-02 JP JP8087575A patent/JPS5947473B2/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53110383A (en) * | 1977-03-08 | 1978-09-27 | Matsushita Electric Ind Co Ltd | Manufacture of semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
JPS5947473B2 (en) | 1984-11-19 |
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