JPS525279A - Semi-conductor production - Google Patents

Semi-conductor production

Info

Publication number
JPS525279A
JPS525279A JP8087575A JP8087575A JPS525279A JP S525279 A JPS525279 A JP S525279A JP 8087575 A JP8087575 A JP 8087575A JP 8087575 A JP8087575 A JP 8087575A JP S525279 A JPS525279 A JP S525279A
Authority
JP
Japan
Prior art keywords
semi
conductor production
conductor
production
gate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8087575A
Other languages
Japanese (ja)
Other versions
JPS5947473B2 (en
Inventor
Yasuo Wada
Teruo Iwasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8087575A priority Critical patent/JPS5947473B2/en
Publication of JPS525279A publication Critical patent/JPS525279A/en
Publication of JPS5947473B2 publication Critical patent/JPS5947473B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: Sheet resistance reduction of poly-crystal Si gate for silicon gate MOSFET.
COPYRIGHT: (C)1977,JPO&Japio
JP8087575A 1975-07-02 1975-07-02 Manufacturing method of semiconductor device Expired JPS5947473B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8087575A JPS5947473B2 (en) 1975-07-02 1975-07-02 Manufacturing method of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8087575A JPS5947473B2 (en) 1975-07-02 1975-07-02 Manufacturing method of semiconductor device

Publications (2)

Publication Number Publication Date
JPS525279A true JPS525279A (en) 1977-01-14
JPS5947473B2 JPS5947473B2 (en) 1984-11-19

Family

ID=13730509

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8087575A Expired JPS5947473B2 (en) 1975-07-02 1975-07-02 Manufacturing method of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5947473B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53110383A (en) * 1977-03-08 1978-09-27 Matsushita Electric Ind Co Ltd Manufacture of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53110383A (en) * 1977-03-08 1978-09-27 Matsushita Electric Ind Co Ltd Manufacture of semiconductor device

Also Published As

Publication number Publication date
JPS5947473B2 (en) 1984-11-19

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