JPS5320775A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5320775A JPS5320775A JP9451076A JP9451076A JPS5320775A JP S5320775 A JPS5320775 A JP S5320775A JP 9451076 A JP9451076 A JP 9451076A JP 9451076 A JP9451076 A JP 9451076A JP S5320775 A JPS5320775 A JP S5320775A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- deffused
- beforehand
- spreading
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Weting (AREA)
- Local Oxidation Of Silicon (AREA)
- Element Separation (AREA)
Abstract
PURPOSE: To prevent the short channel phenomenon owing to spreading of the deffused impurity by forming an oxide film at a low temperature to a semiconductor substrate by a CVD method thereby isolating MOSFETs beforehand.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9451076A JPS5320775A (en) | 1976-08-10 | 1976-08-10 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9451076A JPS5320775A (en) | 1976-08-10 | 1976-08-10 | Production of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5320775A true JPS5320775A (en) | 1978-02-25 |
Family
ID=14112307
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9451076A Pending JPS5320775A (en) | 1976-08-10 | 1976-08-10 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5320775A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS551117A (en) * | 1978-06-16 | 1980-01-07 | Matsushita Electric Ind Co Ltd | Manufacture of semiconductor device |
JPS5529110A (en) * | 1978-08-23 | 1980-03-01 | Hitachi Ltd | Manufacturing of semiconductor device |
-
1976
- 1976-08-10 JP JP9451076A patent/JPS5320775A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS551117A (en) * | 1978-06-16 | 1980-01-07 | Matsushita Electric Ind Co Ltd | Manufacture of semiconductor device |
JPS5529110A (en) * | 1978-08-23 | 1980-03-01 | Hitachi Ltd | Manufacturing of semiconductor device |
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