JPS5320775A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5320775A
JPS5320775A JP9451076A JP9451076A JPS5320775A JP S5320775 A JPS5320775 A JP S5320775A JP 9451076 A JP9451076 A JP 9451076A JP 9451076 A JP9451076 A JP 9451076A JP S5320775 A JPS5320775 A JP S5320775A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
deffused
beforehand
spreading
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9451076A
Other languages
Japanese (ja)
Inventor
Masahiro Iiri
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP9451076A priority Critical patent/JPS5320775A/en
Publication of JPS5320775A publication Critical patent/JPS5320775A/en
Pending legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Local Oxidation Of Silicon (AREA)
  • Element Separation (AREA)

Abstract

PURPOSE: To prevent the short channel phenomenon owing to spreading of the deffused impurity by forming an oxide film at a low temperature to a semiconductor substrate by a CVD method thereby isolating MOSFETs beforehand.
COPYRIGHT: (C)1978,JPO&Japio
JP9451076A 1976-08-10 1976-08-10 Production of semiconductor device Pending JPS5320775A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9451076A JPS5320775A (en) 1976-08-10 1976-08-10 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9451076A JPS5320775A (en) 1976-08-10 1976-08-10 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5320775A true JPS5320775A (en) 1978-02-25

Family

ID=14112307

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9451076A Pending JPS5320775A (en) 1976-08-10 1976-08-10 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5320775A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS551117A (en) * 1978-06-16 1980-01-07 Matsushita Electric Ind Co Ltd Manufacture of semiconductor device
JPS5529110A (en) * 1978-08-23 1980-03-01 Hitachi Ltd Manufacturing of semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS551117A (en) * 1978-06-16 1980-01-07 Matsushita Electric Ind Co Ltd Manufacture of semiconductor device
JPS5529110A (en) * 1978-08-23 1980-03-01 Hitachi Ltd Manufacturing of semiconductor device

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