JPS51148377A - Manufacturing method of mis type semiconductor device - Google Patents

Manufacturing method of mis type semiconductor device

Info

Publication number
JPS51148377A
JPS51148377A JP7257875A JP7257875A JPS51148377A JP S51148377 A JPS51148377 A JP S51148377A JP 7257875 A JP7257875 A JP 7257875A JP 7257875 A JP7257875 A JP 7257875A JP S51148377 A JPS51148377 A JP S51148377A
Authority
JP
Japan
Prior art keywords
semiconductor device
type semiconductor
manufacturing
mis type
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7257875A
Other languages
Japanese (ja)
Other versions
JPS5723429B2 (en
Inventor
Takashi Ito
Takao Nozaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP7257875A priority Critical patent/JPS51148377A/en
Publication of JPS51148377A publication Critical patent/JPS51148377A/en
Publication of JPS5723429B2 publication Critical patent/JPS5723429B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Non-Volatile Memory (AREA)

Abstract

PURPOSE: To stabilize the specific characteristics of MIS type semiconductor device by forming a nitrized film on the surface of Si base plate with heat below 1,300°C and using it as a part of a gate insulation film.
COPYRIGHT: (C)1976,JPO&Japio
JP7257875A 1975-06-14 1975-06-14 Manufacturing method of mis type semiconductor device Granted JPS51148377A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7257875A JPS51148377A (en) 1975-06-14 1975-06-14 Manufacturing method of mis type semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7257875A JPS51148377A (en) 1975-06-14 1975-06-14 Manufacturing method of mis type semiconductor device

Publications (2)

Publication Number Publication Date
JPS51148377A true JPS51148377A (en) 1976-12-20
JPS5723429B2 JPS5723429B2 (en) 1982-05-18

Family

ID=13493394

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7257875A Granted JPS51148377A (en) 1975-06-14 1975-06-14 Manufacturing method of mis type semiconductor device

Country Status (1)

Country Link
JP (1) JPS51148377A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5472668A (en) * 1977-11-21 1979-06-11 Fujitsu Ltd Manufacture for semiconductor device

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59200816A (en) * 1983-04-30 1984-11-14 Aisin Chem Co Ltd Torsional vibration absorbing device
JPH0545846Y2 (en) * 1986-07-29 1993-11-29

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5472668A (en) * 1977-11-21 1979-06-11 Fujitsu Ltd Manufacture for semiconductor device
JPS6139751B2 (en) * 1977-11-21 1986-09-05 Fujitsu Ltd

Also Published As

Publication number Publication date
JPS5723429B2 (en) 1982-05-18

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