JPS53110383A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS53110383A JPS53110383A JP2560477A JP2560477A JPS53110383A JP S53110383 A JPS53110383 A JP S53110383A JP 2560477 A JP2560477 A JP 2560477A JP 2560477 A JP2560477 A JP 2560477A JP S53110383 A JPS53110383 A JP S53110383A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- contact part
- contact
- depth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE: To prevent the faulty contact with the electrode contact part as well as to obtain a channel part which features the depth and length as designed, by forming a deep diffusion region at the contact part with the metal wiring prior to formation of the source and drain diffusion regions.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2560477A JPS53110383A (en) | 1977-03-08 | 1977-03-08 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2560477A JPS53110383A (en) | 1977-03-08 | 1977-03-08 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53110383A true JPS53110383A (en) | 1978-09-27 |
Family
ID=12170499
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2560477A Pending JPS53110383A (en) | 1977-03-08 | 1977-03-08 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53110383A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6296389B1 (en) | 1998-03-25 | 2001-10-02 | Matsushita Electric Industrial Co., Ltd. | Easy-to-open packing bag |
JP2006123994A (en) * | 2004-10-29 | 2006-05-18 | Asahi Kasei Pax Corp | Easy-to-unseal packaging bag |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4911583A (en) * | 1972-06-01 | 1974-02-01 | ||
JPS5128991A (en) * | 1974-09-04 | 1976-03-11 | Ishikawajima Zosen Kakoki Kk | Tagubootoyo no kyuchakusochi |
JPS525279A (en) * | 1975-07-02 | 1977-01-14 | Hitachi Ltd | Semi-conductor production |
JPS52154377A (en) * | 1976-06-18 | 1977-12-22 | Hitachi Ltd | Forming method for contact parts in part of shallow diffused layer |
-
1977
- 1977-03-08 JP JP2560477A patent/JPS53110383A/en active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4911583A (en) * | 1972-06-01 | 1974-02-01 | ||
JPS5128991A (en) * | 1974-09-04 | 1976-03-11 | Ishikawajima Zosen Kakoki Kk | Tagubootoyo no kyuchakusochi |
JPS525279A (en) * | 1975-07-02 | 1977-01-14 | Hitachi Ltd | Semi-conductor production |
JPS52154377A (en) * | 1976-06-18 | 1977-12-22 | Hitachi Ltd | Forming method for contact parts in part of shallow diffused layer |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6296389B1 (en) | 1998-03-25 | 2001-10-02 | Matsushita Electric Industrial Co., Ltd. | Easy-to-open packing bag |
JP2006123994A (en) * | 2004-10-29 | 2006-05-18 | Asahi Kasei Pax Corp | Easy-to-unseal packaging bag |
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