JPS53110383A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS53110383A
JPS53110383A JP2560477A JP2560477A JPS53110383A JP S53110383 A JPS53110383 A JP S53110383A JP 2560477 A JP2560477 A JP 2560477A JP 2560477 A JP2560477 A JP 2560477A JP S53110383 A JPS53110383 A JP S53110383A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
contact part
contact
depth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2560477A
Other languages
Japanese (ja)
Inventor
Kazuhiko Tsuji
Shuji Kondo
Takashi Osone
Shiro Horiuchi
Masaharu Noyori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP2560477A priority Critical patent/JPS53110383A/en
Publication of JPS53110383A publication Critical patent/JPS53110383A/en
Pending legal-status Critical Current

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Landscapes

  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: To prevent the faulty contact with the electrode contact part as well as to obtain a channel part which features the depth and length as designed, by forming a deep diffusion region at the contact part with the metal wiring prior to formation of the source and drain diffusion regions.
COPYRIGHT: (C)1978,JPO&Japio
JP2560477A 1977-03-08 1977-03-08 Manufacture of semiconductor device Pending JPS53110383A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2560477A JPS53110383A (en) 1977-03-08 1977-03-08 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2560477A JPS53110383A (en) 1977-03-08 1977-03-08 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS53110383A true JPS53110383A (en) 1978-09-27

Family

ID=12170499

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2560477A Pending JPS53110383A (en) 1977-03-08 1977-03-08 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS53110383A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6296389B1 (en) 1998-03-25 2001-10-02 Matsushita Electric Industrial Co., Ltd. Easy-to-open packing bag
JP2006123994A (en) * 2004-10-29 2006-05-18 Asahi Kasei Pax Corp Easy-to-unseal packaging bag

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4911583A (en) * 1972-06-01 1974-02-01
JPS5128991A (en) * 1974-09-04 1976-03-11 Ishikawajima Zosen Kakoki Kk Tagubootoyo no kyuchakusochi
JPS525279A (en) * 1975-07-02 1977-01-14 Hitachi Ltd Semi-conductor production
JPS52154377A (en) * 1976-06-18 1977-12-22 Hitachi Ltd Forming method for contact parts in part of shallow diffused layer

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4911583A (en) * 1972-06-01 1974-02-01
JPS5128991A (en) * 1974-09-04 1976-03-11 Ishikawajima Zosen Kakoki Kk Tagubootoyo no kyuchakusochi
JPS525279A (en) * 1975-07-02 1977-01-14 Hitachi Ltd Semi-conductor production
JPS52154377A (en) * 1976-06-18 1977-12-22 Hitachi Ltd Forming method for contact parts in part of shallow diffused layer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6296389B1 (en) 1998-03-25 2001-10-02 Matsushita Electric Industrial Co., Ltd. Easy-to-open packing bag
JP2006123994A (en) * 2004-10-29 2006-05-18 Asahi Kasei Pax Corp Easy-to-unseal packaging bag

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