JPS5440083A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5440083A
JPS5440083A JP10700377A JP10700377A JPS5440083A JP S5440083 A JPS5440083 A JP S5440083A JP 10700377 A JP10700377 A JP 10700377A JP 10700377 A JP10700377 A JP 10700377A JP S5440083 A JPS5440083 A JP S5440083A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
diffusion
areasoof
integration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10700377A
Other languages
Japanese (ja)
Inventor
Shuichi Oya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP10700377A priority Critical patent/JPS5440083A/en
Publication of JPS5440083A publication Critical patent/JPS5440083A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: To realize a small size for the MOS transistor with an enhanced degree of integration by first forming the shallow source and drain region through diffusion and then providing a deep contact region through the push-in diffusion to the necessary areasoof these regions.
COPYRIGHT: (C)1979,JPO&Japio
JP10700377A 1977-09-05 1977-09-05 Manufacture of semiconductor device Pending JPS5440083A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10700377A JPS5440083A (en) 1977-09-05 1977-09-05 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10700377A JPS5440083A (en) 1977-09-05 1977-09-05 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5440083A true JPS5440083A (en) 1979-03-28

Family

ID=14448014

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10700377A Pending JPS5440083A (en) 1977-09-05 1977-09-05 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5440083A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0474417A (en) * 1990-07-16 1992-03-09 Matsushita Electron Corp Manufacture of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0474417A (en) * 1990-07-16 1992-03-09 Matsushita Electron Corp Manufacture of semiconductor device

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