JPS5418684A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5418684A JPS5418684A JP8293177A JP8293177A JPS5418684A JP S5418684 A JPS5418684 A JP S5418684A JP 8293177 A JP8293177 A JP 8293177A JP 8293177 A JP8293177 A JP 8293177A JP S5418684 A JPS5418684 A JP S5418684A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- drain
- enhance
- semiconductor substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE: To increase the drain dielectric strength as well as to enhance the channel length dependence of the threshold voltage by securing previously a difference of the impurity density distribution and the diffusion depth between the source region and the drain region which are formed within the semiconductor substrate.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52082931A JPS6025028B2 (en) | 1977-07-13 | 1977-07-13 | Manufacturing method of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52082931A JPS6025028B2 (en) | 1977-07-13 | 1977-07-13 | Manufacturing method of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5418684A true JPS5418684A (en) | 1979-02-10 |
JPS6025028B2 JPS6025028B2 (en) | 1985-06-15 |
Family
ID=13787969
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP52082931A Expired JPS6025028B2 (en) | 1977-07-13 | 1977-07-13 | Manufacturing method of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6025028B2 (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58180A (en) * | 1981-06-25 | 1983-01-05 | Seiko Epson Corp | Manufacturing method for semiconductor device |
JPS60501083A (en) * | 1983-04-18 | 1985-07-11 | エヌ・シー・アール・インターナショナル・インコーポレイテッド | Manufacturing method of semiconductor device |
JPS60134465A (en) * | 1983-12-23 | 1985-07-17 | Toshiba Corp | Manufacture of semiconductor device |
JPS60140763A (en) * | 1983-12-27 | 1985-07-25 | Matsushita Electric Ind Co Ltd | Manufacture of semiconductor device |
JPS6267873A (en) * | 1985-09-20 | 1987-03-27 | Sony Corp | Manufacture of semiconductor device |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60180020U (en) * | 1984-05-04 | 1985-11-29 | 関東自動車工業株式会社 | Lateral position adjustment device for pedals in vehicles |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5114275A (en) * | 1974-07-25 | 1976-02-04 | Fujitsu Ltd | Handotaisochino seizohoho |
JPS5121478A (en) * | 1974-08-15 | 1976-02-20 | Nippon Electric Co | ZETSUENGEETOGATAHANDOTAISOCHINO SEIZOHOHO |
-
1977
- 1977-07-13 JP JP52082931A patent/JPS6025028B2/en not_active Expired
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5114275A (en) * | 1974-07-25 | 1976-02-04 | Fujitsu Ltd | Handotaisochino seizohoho |
JPS5121478A (en) * | 1974-08-15 | 1976-02-20 | Nippon Electric Co | ZETSUENGEETOGATAHANDOTAISOCHINO SEIZOHOHO |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58180A (en) * | 1981-06-25 | 1983-01-05 | Seiko Epson Corp | Manufacturing method for semiconductor device |
JPS60501083A (en) * | 1983-04-18 | 1985-07-11 | エヌ・シー・アール・インターナショナル・インコーポレイテッド | Manufacturing method of semiconductor device |
JPS60134465A (en) * | 1983-12-23 | 1985-07-17 | Toshiba Corp | Manufacture of semiconductor device |
JPS60140763A (en) * | 1983-12-27 | 1985-07-25 | Matsushita Electric Ind Co Ltd | Manufacture of semiconductor device |
JPS6267873A (en) * | 1985-09-20 | 1987-03-27 | Sony Corp | Manufacture of semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
JPS6025028B2 (en) | 1985-06-15 |
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